The temporal evolution of electrons in EUV-induced plasmas

R.M. Horst, van der; J. Beckers; E.A. Osorio; V.Y. Banine

The temporal evolution of electrons in EUV-induced plasmas

R.M. Horst, van der, J. Beckers, E.A. Osorio, V.Y. Banine

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We studied the temporal evolution of the electron density in a low pressure pulsed plasma induced by high energy photons (92 eV) by means of microwave cavity resonance spectroscopy (MCRS). Although MCRS generates space averaged information about the electron density, we demonstrate here the possibility to obtain spatial information by combining different resonant modes. The results show that the plasma expands to the wall of the cavity on a time scale of tens of microseconds. The speed of this expansion depends on the gas pressure; the higher the gas pressure, the slower the expansion. This effect is explained by ambipolar diffusion, which is inversely proportional to the gas pressure.

Original language	English
Title of host publication	Proceedings of the 32st International Conference of Plasmas and Ionized Gases
Publication status	Published - 28 Jul 2015
Event	32nd International Conference on Phenomena in Ionized Gases (ICPIG 2015), July 26-31, 2015, Iasi, Romania - Iasa, Romania Duration: 26 Jul 2015 → 31 Jul 2015 http://www.icpig2015.net/

Conference

Conference	32nd International Conference on Phenomena in Ionized Gases (ICPIG 2015), July 26-31, 2015, Iasi, Romania
Abbreviated title	ICPIG 2015
Country/Territory	Romania
City	Iasa
Period	26/07/15 → 31/07/15
Internet address	http://www.icpig2015.net/

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@inproceedings{687bc4d6f2cf4891884ed35d8a523e41,

title = "The temporal evolution of electrons in EUV-induced plasmas",

abstract = "We studied the temporal evolution of the electron density in a low pressure pulsed plasma induced by high energy photons (92 eV) by means of microwave cavity resonance spectroscopy (MCRS). Although MCRS generates space averaged information about the electron density, we demonstrate here the possibility to obtain spatial information by combining different resonant modes. The results show that the plasma expands to the wall of the cavity on a time scale of tens of microseconds. The speed of this expansion depends on the gas pressure; the higher the gas pressure, the slower the expansion. This effect is explained by ambipolar diffusion, which is inversely proportional to the gas pressure.",

author = "{Horst, van der}, R.M. and J. Beckers and E.A. Osorio and V.Y. Banine",

note = "Proceedings of the 32st International Conference of Plasmas and Ionized Gases (ICPIG) 26-31 July 2015, Iasi, Romenia; 32nd International Conference on Phenomena in Ionized Gases (ICPIG 2015), July 26-31, 2015, Iasi, Romania, ICPIG 2015 ; Conference date: 26-07-2015 Through 31-07-2015",

year = "2015",

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booktitle = "Proceedings of the 32st International Conference of Plasmas and Ionized Gases",

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T1 - The temporal evolution of electrons in EUV-induced plasmas

AU - Horst, van der, R.M.

AU - Beckers, J.

AU - Osorio, E.A.

AU - Banine, V.Y.

N1 - Proceedings of the 32st International Conference of Plasmas and Ionized Gases (ICPIG) 26-31 July 2015, Iasi, Romenia

PY - 2015/7/28

Y1 - 2015/7/28

N2 - We studied the temporal evolution of the electron density in a low pressure pulsed plasma induced by high energy photons (92 eV) by means of microwave cavity resonance spectroscopy (MCRS). Although MCRS generates space averaged information about the electron density, we demonstrate here the possibility to obtain spatial information by combining different resonant modes. The results show that the plasma expands to the wall of the cavity on a time scale of tens of microseconds. The speed of this expansion depends on the gas pressure; the higher the gas pressure, the slower the expansion. This effect is explained by ambipolar diffusion, which is inversely proportional to the gas pressure.

AB - We studied the temporal evolution of the electron density in a low pressure pulsed plasma induced by high energy photons (92 eV) by means of microwave cavity resonance spectroscopy (MCRS). Although MCRS generates space averaged information about the electron density, we demonstrate here the possibility to obtain spatial information by combining different resonant modes. The results show that the plasma expands to the wall of the cavity on a time scale of tens of microseconds. The speed of this expansion depends on the gas pressure; the higher the gas pressure, the slower the expansion. This effect is explained by ambipolar diffusion, which is inversely proportional to the gas pressure.

M3 - Conference contribution

BT - Proceedings of the 32st International Conference of Plasmas and Ionized Gases

T2 - 32nd International Conference on Phenomena in Ionized Gases (ICPIG 2015), July 26-31, 2015, Iasi, Romania

Y2 - 26 July 2015 through 31 July 2015

ER -

The temporal evolution of electrons in EUV-induced plasmas

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