The temporal evolution of electrons in EUV-induced plasmas

R.M. Horst, van der, J. Beckers, E.A. Osorio, V.Y. Banine

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Abstract

We studied the temporal evolution of the electron density in a low pressure pulsed plasma induced by high energy photons (92 eV) by means of microwave cavity resonance spectroscopy (MCRS). Although MCRS generates space averaged information about the electron density, we demonstrate here the possibility to obtain spatial information by combining different resonant modes. The results show that the plasma expands to the wall of the cavity on a time scale of tens of microseconds. The speed of this expansion depends on the gas pressure; the higher the gas pressure, the slower the expansion. This effect is explained by ambipolar diffusion, which is inversely proportional to the gas pressure.
Original languageEnglish
Title of host publicationProceedings of the 32st International Conference of Plasmas and Ionized Gases
Publication statusPublished - 28 Jul 2015
Event32nd International Conference on Phenomena in Ionized Gases (ICPIG 2015), July 26-31, 2015, Iasi, Romania - Iasa, Romania
Duration: 26 Jul 201531 Jul 2015
http://www.icpig2015.net/

Conference

Conference32nd International Conference on Phenomena in Ionized Gases (ICPIG 2015), July 26-31, 2015, Iasi, Romania
Abbreviated titleICPIG 2015
Country/TerritoryRomania
CityIasa
Period26/07/1531/07/15
Internet address

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