The sheath of an RF plasma : measurements and simulations of the ion energy distribution

R.J.M.M. Snijkers

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

9090 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Department of Applied Physics
Supervisors/Advisors
  • de Hoog, F.J., Promotor
  • Sluijter, F.W., Promotor
  • Kroesen, Gerrit M.W., Copromotor
Award date12 Oct 1993
Place of PublicationEindhoven
Publisher
DOIs
Publication statusPublished - 1993

Cite this