The sheath of an RF plasma : measurements and simulations of the ion energy distribution

R.J.M.M. Snijkers

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics and Science Education
Supervisors/Advisors
  • de Hoog, F.J., Promotor
  • Sluijter, F.W., Promotor
  • Kroesen, Gerrit M.W., Copromotor
Award date12 Oct 1993
Place of PublicationEindhoven
Publisher
DOIs
Publication statusPublished - 1993

Access to Document

  • 403382Final published version, 6.43 MB

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