The role of carrier gas flow in roll-to-roll AP-PECVD synthesized silica moisture barrier films

A.S. Meshkova, F.M. Elam, S.A. Starostin, M.C.M. van de Sanden, H.W. de Vries

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
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Abstract

Moisture barrier films are deposited on a polymer foil by roll-to-roll Atmospheric Pressure Plasma Enhanced CVD reactor using a N2, O2, TEOS gas mixture. The film microstructure and permeation properties are studied as a function of the carrier gas flow rate with both static and dynamic film transport. The microstructure is analyzed by spatially resolved attenuated total reflectance (ATR)-FTIR and correlated with the vertical density gradient obtained in the dynamic films and the moisture barrier performance. It is shown that by varying the carrier gas flow rate the vertical density gradient, or the network porosity, can be tuned by governing the convective transport inside the reactor consequently densifying the inorganic film at fixed energy cost (i.e. Yasuda parameter) of the process. Moreover, adopting the bilayer architecture allows to achieve the same moisture barrier properties of 2 · 10−3 g·m−2·day−1 (40 °C, 90% RH) at only half the film thickness of a single layer barrier films, which consequently leads to a throughput increase of almost two times.

Original languageEnglish
Pages (from-to)20-26
Number of pages7
JournalSurface and Coatings Technology
Volume339
DOIs
Publication statusPublished - 15 Apr 2018

Fingerprint

Plasma enhanced chemical vapor deposition
moisture
Silicon Dioxide
gas flow
Flow of gases
Moisture
Silica
silicon dioxide
flow velocity
reactors
Flow rate
gradients
microstructure
Microstructure
barrier layers
Permeation
Gas mixtures
Density (specific gravity)
Metal foil
Atmospheric pressure

Keywords

  • Atmospheric pressure PECVD
  • Non-uniform deposition rate
  • Silica barrier film
  • Vertical chemical gradient

Cite this

Meshkova, A.S. ; Elam, F.M. ; Starostin, S.A. ; van de Sanden, M.C.M. ; de Vries, H.W. / The role of carrier gas flow in roll-to-roll AP-PECVD synthesized silica moisture barrier films. In: Surface and Coatings Technology. 2018 ; Vol. 339. pp. 20-26.
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The role of carrier gas flow in roll-to-roll AP-PECVD synthesized silica moisture barrier films. / Meshkova, A.S.; Elam, F.M.; Starostin, S.A.; van de Sanden, M.C.M.; de Vries, H.W.

In: Surface and Coatings Technology, Vol. 339, 15.04.2018, p. 20-26.

Research output: Contribution to journalArticleAcademicpeer-review

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T1 - The role of carrier gas flow in roll-to-roll AP-PECVD synthesized silica moisture barrier films

AU - Meshkova, A.S.

AU - Elam, F.M.

AU - Starostin, S.A.

AU - van de Sanden, M.C.M.

AU - de Vries, H.W.

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N2 - Moisture barrier films are deposited on a polymer foil by roll-to-roll Atmospheric Pressure Plasma Enhanced CVD reactor using a N2, O2, TEOS gas mixture. The film microstructure and permeation properties are studied as a function of the carrier gas flow rate with both static and dynamic film transport. The microstructure is analyzed by spatially resolved attenuated total reflectance (ATR)-FTIR and correlated with the vertical density gradient obtained in the dynamic films and the moisture barrier performance. It is shown that by varying the carrier gas flow rate the vertical density gradient, or the network porosity, can be tuned by governing the convective transport inside the reactor consequently densifying the inorganic film at fixed energy cost (i.e. Yasuda parameter) of the process. Moreover, adopting the bilayer architecture allows to achieve the same moisture barrier properties of 2 · 10−3 g·m−2·day−1 (40 °C, 90% RH) at only half the film thickness of a single layer barrier films, which consequently leads to a throughput increase of almost two times.

AB - Moisture barrier films are deposited on a polymer foil by roll-to-roll Atmospheric Pressure Plasma Enhanced CVD reactor using a N2, O2, TEOS gas mixture. The film microstructure and permeation properties are studied as a function of the carrier gas flow rate with both static and dynamic film transport. The microstructure is analyzed by spatially resolved attenuated total reflectance (ATR)-FTIR and correlated with the vertical density gradient obtained in the dynamic films and the moisture barrier performance. It is shown that by varying the carrier gas flow rate the vertical density gradient, or the network porosity, can be tuned by governing the convective transport inside the reactor consequently densifying the inorganic film at fixed energy cost (i.e. Yasuda parameter) of the process. Moreover, adopting the bilayer architecture allows to achieve the same moisture barrier properties of 2 · 10−3 g·m−2·day−1 (40 °C, 90% RH) at only half the film thickness of a single layer barrier films, which consequently leads to a throughput increase of almost two times.

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