The reaction mechanism of W-CVD on Si

P.A.C. Groenen

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Department of Applied Physics
Supervisors/Advisors
  • Brongersma, H.H., Promotor
  • Beijerinck, Herman, Promotor
Award date25 Jan 1993
Place of PublicationEindhoven
Publisher
DOIs
Publication statusPublished - 1993

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