The physics of plasma jets used for fast atomic deposition

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Original language	English
Title of host publication	High temperature plasma jets in the processes of treatment of materials : international workshop, September 1990, Frunze, USSR
Pages	1-11
Publication status	Published - 1990

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@inproceedings{b260317f86104affae9ca7029a9d96f5,

title = "The physics of plasma jets used for fast atomic deposition",

author = "D.C. Schram and J.J. Beulens and A.J.M. Buuron and G.M.W. Kroesen and G.J. Meeusen and A.T.M. Wilbers and D. Milojevic and P.M. Vallinga",

year = "1990",

language = "English",

pages = "1--11",

booktitle = "High temperature plasma jets in the processes of treatment of materials : international workshop, September 1990, Frunze, USSR",

}

TY - GEN

T1 - The physics of plasma jets used for fast atomic deposition

AU - Schram, D.C.

AU - Beulens, J.J.

AU - Buuron, A.J.M.

AU - Kroesen, G.M.W.

AU - Meeusen, G.J.

AU - Wilbers, A.T.M.

AU - Milojevic, D.

AU - Vallinga, P.M.

PY - 1990

Y1 - 1990

M3 - Conference contribution

SP - 1

EP - 11

BT - High temperature plasma jets in the processes of treatment of materials : international workshop, September 1990, Frunze, USSR

ER -