The performance potential of superconducting linear and planar motors

H.B. Koolmees; B.J.H. De Bruyn; J.P.M.B. Vermeulen; J.W. Jansen; E.A. Lomonova

The performance potential of superconducting linear and planar motors

H.B. Koolmees
, B.J.H. De Bruyn
, J.P.M.B. Vermeulen
, J.W. Jansen
, E.A. Lomonova

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

Electromagnetic motors currently used in lithography systems are pushed to their limit and it is challenging to increase acceleration without introducing additional disturbances. Superconductors could provide an improvement in magnetic flux density and/or current density compared to the permanent magnets and copper coils currently used. The improvement potential of three superconducting (SC) alternatives is analysed in this paper. The achievable magnetic flux density with SC electromagnets and SC bulk magnets is derived and the (alternating) current density in a SC coil is presented as a function of cooling power. All three are analysed for a range of cryogenic temperatures. An increase in magnetic flux density of a factor of three is computed at a temperature of 30 K and the same increase in current density is found at 50 K with equal cooling power compared to copper coils. As a result, superconductivity is expected to provide a significant improvement with respect to magnetic flux density and/or current density in a motor application.

Original language	English
Title of host publication	Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
Editors	D. Billington, D. Philips
Publisher	European Society for Precision Engineering and Nanotechnology
Pages	465-466
Number of pages	2
ISBN (Electronic)	9780995775107
Publication status	Published - 2017
Event	17th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2017) - Hannover Congress Centre, Hannover, Germany Duration: 29 May 2017 → 2 Jun 2017 Conference number: 17 http://www.euspen.eu/events/17th-international-conference-exhibition/

Conference

Conference	17th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2017)
Abbreviated title	EUSPEN 2017
Country/Territory	Germany
City	Hannover
Period	29/05/17 → 2/06/17
Internet address	http://www.euspen.eu/events/17th-international-conference-exhibition/

Keywords

AC losses
Current density
Linear motors
Magnetic flux density
Planar motors
Superconductivity

Cite this

Koolmees, H. B., De Bruyn, B. J. H., Vermeulen, J. P. M. B., Jansen, J. W., & Lomonova, E. A. (2017). The performance potential of superconducting linear and planar motors. In D. Billington, & D. Philips (Eds.), Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 (pp. 465-466). European Society for Precision Engineering and Nanotechnology.

Koolmees, H.B. ; De Bruyn, B.J.H. ; Vermeulen, J.P.M.B. et al. / The performance potential of superconducting linear and planar motors. Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. editor / D. Billington ; D. Philips. European Society for Precision Engineering and Nanotechnology, 2017. pp. 465-466

@inproceedings{cd9901295215428fbc80326a0f18ad67,

title = "The performance potential of superconducting linear and planar motors",

abstract = "Electromagnetic motors currently used in lithography systems are pushed to their limit and it is challenging to increase acceleration without introducing additional disturbances. Superconductors could provide an improvement in magnetic flux density and/or current density compared to the permanent magnets and copper coils currently used. The improvement potential of three superconducting (SC) alternatives is analysed in this paper. The achievable magnetic flux density with SC electromagnets and SC bulk magnets is derived and the (alternating) current density in a SC coil is presented as a function of cooling power. All three are analysed for a range of cryogenic temperatures. An increase in magnetic flux density of a factor of three is computed at a temperature of 30 K and the same increase in current density is found at 50 K with equal cooling power compared to copper coils. As a result, superconductivity is expected to provide a significant improvement with respect to magnetic flux density and/or current density in a motor application.",

keywords = "AC losses, Current density, Linear motors, Magnetic flux density, Planar motors, Superconductivity",

author = "H.B. Koolmees and \{De Bruyn\}, B.J.H. and J.P.M.B. Vermeulen and J.W. Jansen and E.A. Lomonova",

year = "2017",

language = "English",

pages = "465--466",

editor = "D. Billington and D. Philips",

booktitle = "Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017",

publisher = "European Society for Precision Engineering and Nanotechnology",

note = "17th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2017), EUSPEN 2017 ; Conference date: 29-05-2017 Through 02-06-2017",

url = "http://www.euspen.eu/events/17th-international-conference-exhibition/",

}

Koolmees, HB, De Bruyn, BJH, Vermeulen, JPMB , Jansen, JW & Lomonova, EA 2017, The performance potential of superconducting linear and planar motors. in D Billington & D Philips (eds), Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. European Society for Precision Engineering and Nanotechnology, pp. 465-466, 17th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2017), Hannover, Germany, 29/05/17.

The performance potential of superconducting linear and planar motors. / Koolmees, H.B.; De Bruyn, B.J.H.; Vermeulen, J.P.M.B. et al.
Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. ed. / D. Billington; D. Philips. European Society for Precision Engineering and Nanotechnology, 2017. p. 465-466.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - The performance potential of superconducting linear and planar motors

AU - Koolmees, H.B.

AU - De Bruyn, B.J.H.

AU - Vermeulen, J.P.M.B.

AU - Jansen, J.W.

AU - Lomonova, E.A.

N1 - Conference code: 17

PY - 2017

Y1 - 2017

N2 - Electromagnetic motors currently used in lithography systems are pushed to their limit and it is challenging to increase acceleration without introducing additional disturbances. Superconductors could provide an improvement in magnetic flux density and/or current density compared to the permanent magnets and copper coils currently used. The improvement potential of three superconducting (SC) alternatives is analysed in this paper. The achievable magnetic flux density with SC electromagnets and SC bulk magnets is derived and the (alternating) current density in a SC coil is presented as a function of cooling power. All three are analysed for a range of cryogenic temperatures. An increase in magnetic flux density of a factor of three is computed at a temperature of 30 K and the same increase in current density is found at 50 K with equal cooling power compared to copper coils. As a result, superconductivity is expected to provide a significant improvement with respect to magnetic flux density and/or current density in a motor application.

AB - Electromagnetic motors currently used in lithography systems are pushed to their limit and it is challenging to increase acceleration without introducing additional disturbances. Superconductors could provide an improvement in magnetic flux density and/or current density compared to the permanent magnets and copper coils currently used. The improvement potential of three superconducting (SC) alternatives is analysed in this paper. The achievable magnetic flux density with SC electromagnets and SC bulk magnets is derived and the (alternating) current density in a SC coil is presented as a function of cooling power. All three are analysed for a range of cryogenic temperatures. An increase in magnetic flux density of a factor of three is computed at a temperature of 30 K and the same increase in current density is found at 50 K with equal cooling power compared to copper coils. As a result, superconductivity is expected to provide a significant improvement with respect to magnetic flux density and/or current density in a motor application.

KW - AC losses

KW - Current density

KW - Linear motors

KW - Magnetic flux density

KW - Planar motors

KW - Superconductivity

UR - https://www.scopus.com/pages/publications/85041323567

M3 - Conference contribution

AN - SCOPUS:85041323567

SP - 465

EP - 466

BT - Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017

A2 - Billington, D.

A2 - Philips, D.

PB - European Society for Precision Engineering and Nanotechnology

T2 - 17th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2017)

Y2 - 29 May 2017 through 2 June 2017

ER -

Koolmees HB, De Bruyn BJH, Vermeulen JPMB , Jansen JW , Lomonova EA. The performance potential of superconducting linear and planar motors. In Billington D, Philips D, editors, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. European Society for Precision Engineering and Nanotechnology. 2017. p. 465-466

The performance potential of superconducting linear and planar motors

Abstract

Conference

Keywords

Other files and links

Fingerprint

Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly

Positioning device, magnetic support system and lithographic apparatus

Cite this