The performance potential of superconducting linear and planar motors

H.B. Koolmees, B.J.H. De Bruyn, J.P.M.B. Vermeulen, J.W. Jansen, E.A. Lomonova

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)

Abstract

Electromagnetic motors currently used in lithography systems are pushed to their limit and it is challenging to increase acceleration without introducing additional disturbances. Superconductors could provide an improvement in magnetic flux density and/or current density compared to the permanent magnets and copper coils currently used. The improvement potential of three superconducting (SC) alternatives is analysed in this paper. The achievable magnetic flux density with SC electromagnets and SC bulk magnets is derived and the (alternating) current density in a SC coil is presented as a function of cooling power. All three are analysed for a range of cryogenic temperatures. An increase in magnetic flux density of a factor of three is computed at a temperature of 30 K and the same increase in current density is found at 50 K with equal cooling power compared to copper coils. As a result, superconductivity is expected to provide a significant improvement with respect to magnetic flux density and/or current density in a motor application.

Original languageEnglish
Title of host publicationProceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
EditorsD. Billington, D. Philips
PublisherEuropean Society for Precision Engineering and Nanotechnology
Pages465-466
Number of pages2
ISBN (Electronic)9780995775107
Publication statusPublished - 2017
Event17th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2017) - Hannover Congress Centre, Hannover, Germany
Duration: 29 May 20172 Jun 2017
Conference number: 17
http://www.euspen.eu/events/17th-international-conference-exhibition/

Conference

Conference17th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2017)
Abbreviated titleEUSPEN 2017
Country/TerritoryGermany
CityHannover
Period29/05/172/06/17
Internet address

Keywords

  • AC losses
  • Current density
  • Linear motors
  • Magnetic flux density
  • Planar motors
  • Superconductivity

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