The performance potential of superconducting linear and planar motors

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Abstract

Electromagnetic motors currently used in lithography systems are pushed to their limit and it is challenging to increase acceleration without introducing additional disturbances. Superconductors could provide an improvement in magnetic flux density and/or current density compared to the permanent magnets and copper coils currently used. The improvement potential of three superconducting (SC) alternatives is analysed in this paper. The achievable magnetic flux density with SC electromagnets and SC bulk magnets is derived and the (alternating) current density in a SC coil is presented as a function of cooling power. All three are analysed for a range of cryogenic temperatures. An increase in magnetic flux density of a factor of three is computed at a temperature of 30 K and the same increase in current density is found at 50 K with equal cooling power compared to copper coils. As a result, superconductivity is expected to provide a significant improvement with respect to magnetic flux density and/or current density in a motor application.

LanguageEnglish
Title of host publicationProceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
EditorsD. Billington, D. Philips
PublisherEuropean Society for Precision Engineering and Nanotechnology
Pages465-466
Number of pages2
ISBN (Electronic)9780995775107
StatePublished - 2017
Event17th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2017) - Hannover Congress Centre, Hannover, Germany
Duration: 29 May 20172 Jun 2017
Conference number: 17
http://www.euspen.eu/events/17th-international-conference-exhibition/

Conference

Conference17th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2017)
Abbreviated titleEUSPEN 2017
CountryGermany
CityHannover
Period29/05/172/06/17
Internet address

Fingerprint

Magnetic flux
magnetic flux
Current density
flux density
current density
coils
Copper
Cooling
cooling
copper
Electromagnets
electromagnets
cryogenic temperature
Superconductivity
permanent magnets
Cryogenics
Lithography
Permanent magnets
Superconducting materials
Magnets

Keywords

  • AC losses
  • Current density
  • Linear motors
  • Magnetic flux density
  • Planar motors
  • Superconductivity

Cite this

Koolmees, H. B., De Bruyn, B. J. H., Vermeulen, J. P. M. B., Jansen, J. W., & Lomonova, E. A. (2017). The performance potential of superconducting linear and planar motors. In D. Billington, & D. Philips (Eds.), Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 (pp. 465-466). European Society for Precision Engineering and Nanotechnology.
Koolmees, H.B. ; De Bruyn, B.J.H. ; Vermeulen, J.P.M.B. ; Jansen, J.W. ; Lomonova, E.A./ The performance potential of superconducting linear and planar motors. Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. editor / D. Billington ; D. Philips. European Society for Precision Engineering and Nanotechnology, 2017. pp. 465-466
@inproceedings{cd9901295215428fbc80326a0f18ad67,
title = "The performance potential of superconducting linear and planar motors",
abstract = "Electromagnetic motors currently used in lithography systems are pushed to their limit and it is challenging to increase acceleration without introducing additional disturbances. Superconductors could provide an improvement in magnetic flux density and/or current density compared to the permanent magnets and copper coils currently used. The improvement potential of three superconducting (SC) alternatives is analysed in this paper. The achievable magnetic flux density with SC electromagnets and SC bulk magnets is derived and the (alternating) current density in a SC coil is presented as a function of cooling power. All three are analysed for a range of cryogenic temperatures. An increase in magnetic flux density of a factor of three is computed at a temperature of 30 K and the same increase in current density is found at 50 K with equal cooling power compared to copper coils. As a result, superconductivity is expected to provide a significant improvement with respect to magnetic flux density and/or current density in a motor application.",
keywords = "AC losses, Current density, Linear motors, Magnetic flux density, Planar motors, Superconductivity",
author = "H.B. Koolmees and {De Bruyn}, B.J.H. and J.P.M.B. Vermeulen and J.W. Jansen and E.A. Lomonova",
year = "2017",
language = "English",
pages = "465--466",
editor = "D. Billington and D. Philips",
booktitle = "Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017",
publisher = "European Society for Precision Engineering and Nanotechnology",

}

Koolmees, HB, De Bruyn, BJH, Vermeulen, JPMB, Jansen, JW & Lomonova, EA 2017, The performance potential of superconducting linear and planar motors. in D Billington & D Philips (eds), Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. European Society for Precision Engineering and Nanotechnology, pp. 465-466, 17th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2017), Hannover, Germany, 29/05/17.

The performance potential of superconducting linear and planar motors. / Koolmees, H.B.; De Bruyn, B.J.H.; Vermeulen, J.P.M.B.; Jansen, J.W.; Lomonova, E.A.

Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. ed. / D. Billington; D. Philips. European Society for Precision Engineering and Nanotechnology, 2017. p. 465-466.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - The performance potential of superconducting linear and planar motors

AU - Koolmees,H.B.

AU - De Bruyn,B.J.H.

AU - Vermeulen,J.P.M.B.

AU - Jansen,J.W.

AU - Lomonova,E.A.

PY - 2017

Y1 - 2017

N2 - Electromagnetic motors currently used in lithography systems are pushed to their limit and it is challenging to increase acceleration without introducing additional disturbances. Superconductors could provide an improvement in magnetic flux density and/or current density compared to the permanent magnets and copper coils currently used. The improvement potential of three superconducting (SC) alternatives is analysed in this paper. The achievable magnetic flux density with SC electromagnets and SC bulk magnets is derived and the (alternating) current density in a SC coil is presented as a function of cooling power. All three are analysed for a range of cryogenic temperatures. An increase in magnetic flux density of a factor of three is computed at a temperature of 30 K and the same increase in current density is found at 50 K with equal cooling power compared to copper coils. As a result, superconductivity is expected to provide a significant improvement with respect to magnetic flux density and/or current density in a motor application.

AB - Electromagnetic motors currently used in lithography systems are pushed to their limit and it is challenging to increase acceleration without introducing additional disturbances. Superconductors could provide an improvement in magnetic flux density and/or current density compared to the permanent magnets and copper coils currently used. The improvement potential of three superconducting (SC) alternatives is analysed in this paper. The achievable magnetic flux density with SC electromagnets and SC bulk magnets is derived and the (alternating) current density in a SC coil is presented as a function of cooling power. All three are analysed for a range of cryogenic temperatures. An increase in magnetic flux density of a factor of three is computed at a temperature of 30 K and the same increase in current density is found at 50 K with equal cooling power compared to copper coils. As a result, superconductivity is expected to provide a significant improvement with respect to magnetic flux density and/or current density in a motor application.

KW - AC losses

KW - Current density

KW - Linear motors

KW - Magnetic flux density

KW - Planar motors

KW - Superconductivity

UR - http://www.scopus.com/inward/record.url?scp=85041323567&partnerID=8YFLogxK

M3 - Conference contribution

SP - 465

EP - 466

BT - Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017

PB - European Society for Precision Engineering and Nanotechnology

ER -

Koolmees HB, De Bruyn BJH, Vermeulen JPMB, Jansen JW, Lomonova EA. The performance potential of superconducting linear and planar motors. In Billington D, Philips D, editors, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. European Society for Precision Engineering and Nanotechnology. 2017. p. 465-466.