The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film

C.A. Yuan, A.E. Flower, O. Sluis, van der, G.Q. Zhang, L.J. Ernst, M. Cherkaoui, W.D. Driel, van

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the 9th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE 2008), Germany, Freiburg
Publication statusPublished - 2008

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