The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film

C.A. Yuan, A.E. Flower, O. Sluis, van der, G.Q. Zhang, L.J. Ernst, M. Cherkaoui, W.D. Driel, van

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings of the 9th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE 2008), Germany, Freiburg
Pages199-203
Publication statusPublished - 2008

Cite this