The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film

C.A. Yuan; A.E. Flower; O. Sluis, van der; G.Q. Zhang; L.J. Ernst; M. Cherkaoui; W.D. Driel, van

The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film

C.A. Yuan, A.E. Flower, O. Sluis, van der, G.Q. Zhang, L.J. Ernst, M. Cherkaoui, W.D. Driel, van

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the 9th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE 2008), Germany, Freiburg
Pages	199-203
Publication status	Published - 2008

Cite this

Yuan, C. A., Flower, A. E., Sluis, van der, O., Zhang, G. Q., Ernst, L. J., Cherkaoui, M., & Driel, van, W. D. (2008). The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film. In Proceedings of the 9th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE 2008), Germany, Freiburg (pp. 199-203)

Yuan, C.A. ; Flower, A.E. ; Sluis, van der, O. et al. / The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film. Proceedings of the 9th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE 2008), Germany, Freiburg. 2008. pp. 199-203

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title = "The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film",

author = "C.A. Yuan and A.E. Flower and {Sluis, van der}, O. and G.Q. Zhang and L.J. Ernst and M. Cherkaoui and {Driel, van}, W.D.",

year = "2008",

language = "English",

pages = "199--203",

booktitle = "Proceedings of the 9th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE 2008), Germany, Freiburg",

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Yuan, CA, Flower, AE, Sluis, van der, O, Zhang, GQ, Ernst, LJ, Cherkaoui, M & Driel, van, WD 2008, The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film. in Proceedings of the 9th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE 2008), Germany, Freiburg. pp. 199-203.

The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film. / Yuan, C.A.; Flower, A.E.; Sluis, van der, O. et al.
Proceedings of the 9th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE 2008), Germany, Freiburg. 2008. p. 199-203.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film

AU - Yuan, C.A.

AU - Flower, A.E.

AU - Sluis, van der, O.

AU - Zhang, G.Q.

AU - Ernst, L.J.

AU - Cherkaoui, M.

AU - Driel, van, W.D.

PY - 2008

Y1 - 2008

M3 - Conference contribution

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EP - 203

BT - Proceedings of the 9th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE 2008), Germany, Freiburg

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Yuan CA, Flower AE, Sluis, van der O, Zhang GQ, Ernst LJ, Cherkaoui M et al. The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film. In Proceedings of the 9th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE 2008), Germany, Freiburg. 2008. p. 199-203