The influence of oxide surface layers on bulk electron probe microanalysis of oxygen : application to Ti-Si-O compounds

J.I. Goldstein, S.K. Choi, F.J.J. Loo, van, H.J.M. Heijligers, G.F. Bastin, W.G. Sloof

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Abstract

This paper discusses a generalized method to measure with the electron probe microanalyzer (EPMA) the oxygen in a material contg. a surface oxide layer. The continuum background is the most difficult to measure, particularly for materials in which oxygen-free samples cannot be produced. The method depends on the prepn. of either oxygen-free samples or well characterized oxygen-contg. samples. Specific application of the method to the Ti-Si-O system is discussed. In addn., measurements of oxide surface-layer thickness of 3.6-8.0 nm on Ti and Ti-Si compds. were obtained using EPMA and a scanning Auger microprobe (SAM). The nature of the oxide surface layers was shown using XPS. [on SciFinder (R)]
Original languageEnglish
Pages (from-to)165-170
JournalScanning
Volume15
Issue number3
DOIs
Publication statusPublished - 1993

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