The Gaussmount: design of a magnetic vibration isolation system

D.T.E.H. van Casteren

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

Advances in semiconductor manufacturing equipment demand for continuous vibration isolation system improvements, including vacuum compatibility. At Eindhoven University of Technology, therefore, a noncontact, non-fluid or non-gas, permanent magnet-based vibration isolation system has been modelled, designed and constructed, capable of levitating and isolating a mass of 730 kg.
Original languageEnglish
Pages (from-to)38-42
JournalMikroniek
Volume2017
Issue number2
Publication statusPublished - 2017

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