Abstract
Advances in semiconductor manufacturing equipment demand for continuous vibration isolation system improvements, including vacuum compatibility. At Eindhoven University of Technology, therefore, a noncontact, non-fluid or non-gas, permanent magnet-based vibration isolation system has been modelled, designed and constructed, capable of levitating and isolating a mass of 730 kg.
| Original language | English |
|---|---|
| Pages (from-to) | 38-42 |
| Journal | Mikroniek |
| Volume | 2017 |
| Issue number | 2 |
| Publication status | Published - 2017 |