The expanding thermal plasma as an intense source of SiH3 for the fast deposition of a-Si:H

M.C.M. Sanden, van de, R.J. Severens, W.M.M. Kessels, J. Bastiaanssen, B.W.C. Hovens

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Abstract

Abstract only.

Original language	English
Title of host publication	Abstracts presented at MRS Spring '97 : 1997 spring meeting, March 31-April 4, San Francisco, California, USA
Pages	31-
Publication status	Published - 1997
Event	1997 MRS Spring Meeting & Exhibit - San Francisco, United States Duration: 31 Mar 1997 → 4 Apr 1997 https://www.mrs.org/spring1997 http://www.mrs.org/s97-program-l/

Conference	1997 MRS Spring Meeting & Exhibit
Country/Territory	United States
City	San Francisco
Period	31/03/97 → 4/04/97
Other
Internet address	https://www.mrs.org/spring1997 http://www.mrs.org/s97-program-l/

@inproceedings{4c81b83dfaf24e2a920426e32d117d3e,

title = "The expanding thermal plasma as an intense source of SiH3 for the fast deposition of a-Si:H",

abstract = "Abstract only.",

author = "{Sanden, van de}, M.C.M. and R.J. Severens and W.M.M. Kessels and J. Bastiaanssen and B.W.C. Hovens",

year = "1997",

language = "English",

pages = "31--",

booktitle = "Abstracts presented at MRS Spring '97 : 1997 spring meeting, March 31-April 4, San Francisco, California, USA",

note = "1997 MRS Spring Meeting & Exhibit ; Conference date: 31-03-1997 Through 04-04-1997",

url = "https://www.mrs.org/spring1997, http://www.mrs.org/s97-program-l/",

}

Sanden, van de, MCM, Severens, RJ, Kessels, WMM, Bastiaanssen, J & Hovens, BWC 1997, The expanding thermal plasma as an intense source of SiH3 for the fast deposition of a-Si:H. in Abstracts presented at MRS Spring '97 : 1997 spring meeting, March 31-April 4, San Francisco, California, USA. pp. 31-, 1997 MRS Spring Meeting & Exhibit, San Francisco, California, United States, 31/03/97.

The expanding thermal plasma as an intense source of SiH3 for the fast deposition of a-Si:H. / Sanden, van de, M.C.M.; Severens, R.J.; Kessels, W.M.M. et al.
Abstracts presented at MRS Spring '97 : 1997 spring meeting, March 31-April 4, San Francisco, California, USA. 1997. p. 31-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - The expanding thermal plasma as an intense source of SiH3 for the fast deposition of a-Si:H

AU - Sanden, van de, M.C.M.

AU - Severens, R.J.

AU - Kessels, W.M.M.

AU - Bastiaanssen, J.

AU - Hovens, B.W.C.

PY - 1997

Y1 - 1997

N2 - Abstract only.

AB - Abstract only.

M3 - Conference contribution

SP - 31-

BT - Abstracts presented at MRS Spring '97 : 1997 spring meeting, March 31-April 4, San Francisco, California, USA

T2 - 1997 MRS Spring Meeting & Exhibit

Y2 - 31 March 1997 through 4 April 1997

ER -