The electron density in a microwave-induced argon plasma determined from the continuum radiation

E.I. Iordanova, M. Guillemier, N. Vries, de, L. Baede, J.J.A.M. Mullen, van der

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

The aim of this study is to present a method for the electron density (ne) determination using continuum radiation. The radiation is calibrated with a ribbon lamp and is thus measured absolutely. The method is applied to a microwave induced argon plasma created by a surfatron (2.46 GHz) for which the standard settings are an input power 60 W and a gas pressure15 mbar. Due to the low degree of ionisation, the influence of electron-ion interactions can be neglected; the radiation is predominantly generated by free-free interactions between electron and atoms. The method provides the electron density for different plasma locations and plasma settings and ranges from 6 1018 m-3 to 2 1019m-3. It is found that ne decreases in the direction of the propagating surface wave and that depends on the power.
Original languageEnglish
Title of host publicationXXVIII International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic. Proceedings
EditorsJ. Schmidt, M. Simek, S. Pekarek, V. Prukner
Place of PublicationBristol, United Kingdom
PublisherInstitute of Physics
Pages1591-1593
ISBN (Print)978-80-87026-01-4
Publication statusPublished - 2007
Event28th International Conference on Phenomena in Ionized Gases (ICPIG 2007), July 15-20, 2007, Prague, Czech Republic - Prague, Czech Republic
Duration: 15 Jul 200720 Jul 2007

Conference

Conference28th International Conference on Phenomena in Ionized Gases (ICPIG 2007), July 15-20, 2007, Prague, Czech Republic
Abbreviated titleICPIG 2007
Country/TerritoryCzech Republic
CityPrague
Period15/07/0720/07/07

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