The electron density in a microwave-induced argon plasma determined from the continuum radiation

E.I. Iordanova; M. Guillemier; N. Vries, de; L. Baede; J.J.A.M. Mullen, van der

The electron density in a microwave-induced argon plasma determined from the continuum radiation

E.I. Iordanova, M. Guillemier, N. Vries, de, L. Baede, J.J.A.M. Mullen, van der

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

The aim of this study is to present a method for the electron density (ne) determination using continuum radiation. The radiation is calibrated with a ribbon lamp and is thus measured absolutely. The method is applied to a microwave induced argon plasma created by a surfatron (2.46 GHz) for which the standard settings are an input power 60 W and a gas pressure15 mbar. Due to the low degree of ionisation, the influence of electron-ion interactions can be neglected; the radiation is predominantly generated by free-free interactions between electron and atoms. The method provides the electron density for different plasma locations and plasma settings and ranges from 6 1018 m-3 to 2 1019m-3. It is found that ne decreases in the direction of the propagating surface wave and that depends on the power.

Original language	English
Title of host publication	XXVIII International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic. Proceedings
Editors	J. Schmidt, M. Simek, S. Pekarek, V. Prukner
Place of Publication	Bristol, United Kingdom
Publisher	Institute of Physics
Pages	1591-1593
ISBN (Print)	978-80-87026-01-4
Publication status	Published - 2007
Event	28th International Conference on Phenomena in Ionized Gases (ICPIG 2007), July 15-20, 2007, Prague, Czech Republic - Prague, Czech Republic Duration: 15 Jul 2007 → 20 Jul 2007

Conference

Conference	28th International Conference on Phenomena in Ionized Gases (ICPIG 2007), July 15-20, 2007, Prague, Czech Republic
Abbreviated title	ICPIG 2007
Country/Territory	Czech Republic
City	Prague
Period	15/07/07 → 20/07/07

Cite this

Iordanova, E. I., Guillemier, M., Vries, de, N., Baede, L., & Mullen, van der, J. J. A. M. (2007). The electron density in a microwave-induced argon plasma determined from the continuum radiation. In J. Schmidt, M. Simek, S. Pekarek, & V. Prukner (Eds.), XXVIII International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic. Proceedings (pp. 1591-1593). Institute of Physics.

Iordanova, E.I. ; Guillemier, M. ; Vries, de, N. et al. / The electron density in a microwave-induced argon plasma determined from the continuum radiation. XXVIII International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic. Proceedings. editor / J. Schmidt ; M. Simek ; S. Pekarek ; V. Prukner. Bristol, United Kingdom : Institute of Physics, 2007. pp. 1591-1593

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title = "The electron density in a microwave-induced argon plasma determined from the continuum radiation",

abstract = "The aim of this study is to present a method for the electron density (ne) determination using continuum radiation. The radiation is calibrated with a ribbon lamp and is thus measured absolutely. The method is applied to a microwave induced argon plasma created by a surfatron (2.46 GHz) for which the standard settings are an input power 60 W and a gas pressure15 mbar. Due to the low degree of ionisation, the influence of electron-ion interactions can be neglected; the radiation is predominantly generated by free-free interactions between electron and atoms. The method provides the electron density for different plasma locations and plasma settings and ranges from 6 1018 m-3 to 2 1019m-3. It is found that ne decreases in the direction of the propagating surface wave and that depends on the power.",

author = "E.I. Iordanova and M. Guillemier and {Vries, de}, N. and L. Baede and {Mullen, van der}, J.J.A.M.",

year = "2007",

language = "English",

isbn = "978-80-87026-01-4",

pages = "1591--1593",

editor = "J. Schmidt and M. Simek and S. Pekarek and V. Prukner",

booktitle = "XXVIII International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic. Proceedings",

publisher = "Institute of Physics",

address = "United Kingdom",

note = "28th International Conference on Phenomena in Ionized Gases (ICPIG 2007), July 15-20, 2007, Prague, Czech Republic, ICPIG 2007 ; Conference date: 15-07-2007 Through 20-07-2007",

}

Iordanova, EI, Guillemier, M, Vries, de, N, Baede, L & Mullen, van der, JJAM 2007, The electron density in a microwave-induced argon plasma determined from the continuum radiation. in J Schmidt, M Simek, S Pekarek & V Prukner (eds), XXVIII International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic. Proceedings. Institute of Physics, Bristol, United Kingdom, pp. 1591-1593, 28th International Conference on Phenomena in Ionized Gases (ICPIG 2007), July 15-20, 2007, Prague, Czech Republic, Prague, Czech Republic, 15/07/07.

The electron density in a microwave-induced argon plasma determined from the continuum radiation. / Iordanova, E.I.; Guillemier, M.; Vries, de, N. et al.
XXVIII International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic. Proceedings. ed. / J. Schmidt; M. Simek; S. Pekarek; V. Prukner. Bristol, United Kingdom: Institute of Physics, 2007. p. 1591-1593.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - The electron density in a microwave-induced argon plasma determined from the continuum radiation

AU - Iordanova, E.I.

AU - Guillemier, M.

AU - Vries, de, N.

AU - Baede, L.

AU - Mullen, van der, J.J.A.M.

PY - 2007

Y1 - 2007

N2 - The aim of this study is to present a method for the electron density (ne) determination using continuum radiation. The radiation is calibrated with a ribbon lamp and is thus measured absolutely. The method is applied to a microwave induced argon plasma created by a surfatron (2.46 GHz) for which the standard settings are an input power 60 W and a gas pressure15 mbar. Due to the low degree of ionisation, the influence of electron-ion interactions can be neglected; the radiation is predominantly generated by free-free interactions between electron and atoms. The method provides the electron density for different plasma locations and plasma settings and ranges from 6 1018 m-3 to 2 1019m-3. It is found that ne decreases in the direction of the propagating surface wave and that depends on the power.

AB - The aim of this study is to present a method for the electron density (ne) determination using continuum radiation. The radiation is calibrated with a ribbon lamp and is thus measured absolutely. The method is applied to a microwave induced argon plasma created by a surfatron (2.46 GHz) for which the standard settings are an input power 60 W and a gas pressure15 mbar. Due to the low degree of ionisation, the influence of electron-ion interactions can be neglected; the radiation is predominantly generated by free-free interactions between electron and atoms. The method provides the electron density for different plasma locations and plasma settings and ranges from 6 1018 m-3 to 2 1019m-3. It is found that ne decreases in the direction of the propagating surface wave and that depends on the power.

M3 - Conference contribution

SN - 978-80-87026-01-4

SP - 1591

EP - 1593

BT - XXVIII International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic. Proceedings

A2 - Schmidt, J.

A2 - Simek, M.

A2 - Pekarek, S.

A2 - Prukner, V.

PB - Institute of Physics

CY - Bristol, United Kingdom

T2 - 28th International Conference on Phenomena in Ionized Gases (ICPIG 2007), July 15-20, 2007, Prague, Czech Republic

Y2 - 15 July 2007 through 20 July 2007

ER -

Iordanova EI, Guillemier M, Vries, de N, Baede L, Mullen, van der JJAM. The electron density in a microwave-induced argon plasma determined from the continuum radiation. In Schmidt J, Simek M, Pekarek S, Prukner V, editors, XXVIII International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic. Proceedings. Bristol, United Kingdom: Institute of Physics. 2007. p. 1591-1593

The electron density in a microwave-induced argon plasma determined from the continuum radiation

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