The effect of near monoenergetic ion bombardment on the expanding thermal plasma deposition of a-Si:H

I.T. Martin; M.C.M. Sanden, van de

The effect of near monoenergetic ion bombardment on the expanding thermal plasma deposition of a-Si:H

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	ICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA
Editors	E.A. Schiff, B. Nelson, H.M. Branz
Pages	ThP15.18-
Publication status	Published - 2007

Cite this

Martin, I. T., & Sanden, van de, M. C. M. (2007). The effect of near monoenergetic ion bombardment on the expanding thermal plasma deposition of a-Si:H. In E. A. Schiff, B. Nelson, & H. M. Branz (Eds.), ICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA (pp. ThP15.18-)

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author = "I.T. Martin and {Sanden, van de}, M.C.M.",

year = "2007",

language = "English",

pages = "ThP15.18--",

editor = "E.A. Schiff and B. Nelson and H.M. Branz",

booktitle = "ICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA",

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The effect of near monoenergetic ion bombardment on the expanding thermal plasma deposition of a-Si:H. / Martin, I.T.; Sanden, van de, M.C.M.
ICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA. ed. / E.A. Schiff; B. Nelson; H.M. Branz. 2007. p. ThP15.18-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - The effect of near monoenergetic ion bombardment on the expanding thermal plasma deposition of a-Si:H

AU - Martin, I.T.

AU - Sanden, van de, M.C.M.

PY - 2007

Y1 - 2007

M3 - Conference contribution

SP - ThP15.18-

BT - ICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA

A2 - Schiff, E.A.

A2 - Nelson, B.

A2 - Branz, H.M.

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