The Design of an AI Method to Detect Defects on Microchips Using AFM Images

Research output: Thesis › EngD Thesis

Original language	English
Supervisors/Advisors	Muntean, Tiberiu, Supervisor van de Laar, Jakob, External supervisor Simons, Erik, External supervisor, External person
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Publication status	Published - Feb 2023

EngD thesis. - Confidential.

Cite this

@phdthesis{de414f260ded43cb8827e9bf56c72dec,

title = "The Design of an AI Method to Detect Defects on Microchips Using AFM Images",

author = "Elham Khani",

note = "EngD thesis. - Confidential.",

year = "2023",

month = feb,

language = "English",

series = "EngD Thesis",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

}