The deformation of the moving magnet plate of a commutated magnetically levitated planar actuator

J.M.M. Rovers, J. Achterberg, M.J.C. Ronde, J.W. Jansen, J.C. Compter, E. Lomonova, C.M.M. Lierop, van, M.J.G. Molengraft, van de

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Engineering & Materials Science