The Consequences of Random Sequential Adsorption for the Precursor Packing and Growth-Per-Cycle of Atomic Layer Deposition Processes

I. Tezsevin, J.H. Deijkers, Marc J.M. Merkx, W.M.M. Kessels, Tania E. Sandoval (Corresponding author), Adriaan J.M. Mackus (Corresponding author)

Research output: Contribution to journal › Article › Academic › peer-review

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