The business of fast ALD equipment for depositing alumina passivation layers on crystalline silicon solar cells

Ad Vermeer, Roger Gortzen, P. Poodt, F. Roozeboom

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Fingerprint

Dive into the research topics of 'The business of fast ALD equipment for depositing alumina passivation layers on crystalline silicon solar cells'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds