The business of fast ALD equipment for depositing alumina passivation layers on crystalline silicon solar cells

Ad Vermeer, Roger Gortzen, P. Poodt, F. Roozeboom

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


Atomic Layer Deposition (ALD) is a gas phase deposition technique for depositing very high quality thin films with an unsurpassed conformality. The main drawback of ALD however is the very low deposition rate (∼ 1 nm/min). Recently, record deposition rates for alumina of up to 1 nm/s were reached using spatial ALD, while maintaining the typical assets regarding film quality as obtained by conventional, slow ALD [1]. This allows for ALD at high throughput numbers. One interesting application is passivation of crystalline silicon solar cells. Applying a thin alumina layer is reported to increase solar cell efficiency and enables the use of thinner wafers, thus reducing the main cost factor [2]. In this paper we report on the latest progress made by SoLayTec that delivered a working prototype of a system realizing full area single sided deposition of alumina on 156 × 156 mm 2, mono- and multi crystalline silicon wafers for solar cell applications. The alumina layers showed excellent passivation. Based on this concept, a high-throughput ALD deposition tool is being developed targeting throughput numbers of up to 3000 wafers/hr. Finally, we report on the process of commercializing this technology.

Original languageEnglish
Title of host publicationThe Business of Nanotechnology III
Place of PublicationWarrendale
PublisherMaterials Research Society
Number of pages7
ISBN (Print)9781618395559
Publication statusPublished - 1 Dec 2011
Event2011 Materials Research Society Spring Meeting - San Francisco, CA, United States
Duration: 25 Apr 201129 Apr 2011

Publication series

NameMaterials Research Society symposium proceedings
ISSN (Print)0272-9172


Conference2011 Materials Research Society Spring Meeting
Country/TerritoryUnited States
CitySan Francisco, CA


Dive into the research topics of 'The business of fast ALD equipment for depositing alumina passivation layers on crystalline silicon solar cells'. Together they form a unique fingerprint.

Cite this