The business of fast ALD equipment for depositing alumina passivation layers on crystalline silicon solar cells

Ad Vermeer, Roger Gortzen, P. Poodt, F. Roozeboom

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

Atomic Layer Deposition (ALD) is a gas phase deposition technique for depositing very high quality thin films with an unsurpassed conformality. The main drawback of ALD however is the very low deposition rate (∼ 1 nm/min). Recently, record deposition rates for alumina of up to 1 nm/s were reached using spatial ALD, while maintaining the typical assets regarding film quality as obtained by conventional, slow ALD [1]. This allows for ALD at high throughput numbers. One interesting application is passivation of crystalline silicon solar cells. Applying a thin alumina layer is reported to increase solar cell efficiency and enables the use of thinner wafers, thus reducing the main cost factor [2]. In this paper we report on the latest progress made by SoLayTec that delivered a working prototype of a system realizing full area single sided deposition of alumina on 156 × 156 mm 2, mono- and multi crystalline silicon wafers for solar cell applications. The alumina layers showed excellent passivation. Based on this concept, a high-throughput ALD deposition tool is being developed targeting throughput numbers of up to 3000 wafers/hr. Finally, we report on the process of commercializing this technology.

Original languageEnglish
Title of host publicationThe Business of Nanotechnology III
Place of PublicationWarrendale
PublisherMaterials Research Society
Pages61-67
Number of pages7
ISBN (Print)9781618395559
DOIs
Publication statusPublished - 1 Dec 2011
Event2011 Materials Research Society Spring Meeting - San Francisco, CA, United States
Duration: 25 Apr 201129 Apr 2011

Publication series

NameMaterials Research Society symposium proceedings
Volume1353
ISSN (Print)0272-9172

Conference

Conference2011 Materials Research Society Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period25/04/1129/04/11

Fingerprint

Atomic layer deposition
Aluminum Oxide
Silicon solar cells
atomic layer epitaxy
Passivation
passivity
Alumina
aluminum oxides
solar cells
Crystalline materials
Industry
Throughput
wafers
Deposition rates
Solar cells
Silicon wafers
Gases
prototypes
vapor phases
costs

Cite this

Vermeer, A., Gortzen, R., Poodt, P., & Roozeboom, F. (2011). The business of fast ALD equipment for depositing alumina passivation layers on crystalline silicon solar cells. In The Business of Nanotechnology III (pp. 61-67). (Materials Research Society symposium proceedings; Vol. 1353). Warrendale: Materials Research Society. https://doi.org/10.1557/opl.2011.1497
Vermeer, Ad ; Gortzen, Roger ; Poodt, P. ; Roozeboom, F. / The business of fast ALD equipment for depositing alumina passivation layers on crystalline silicon solar cells. The Business of Nanotechnology III. Warrendale : Materials Research Society, 2011. pp. 61-67 (Materials Research Society symposium proceedings).
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Vermeer, A, Gortzen, R, Poodt, P & Roozeboom, F 2011, The business of fast ALD equipment for depositing alumina passivation layers on crystalline silicon solar cells. in The Business of Nanotechnology III. Materials Research Society symposium proceedings, vol. 1353, Materials Research Society, Warrendale, pp. 61-67, 2011 Materials Research Society Spring Meeting, San Francisco, CA, United States, 25/04/11. https://doi.org/10.1557/opl.2011.1497

The business of fast ALD equipment for depositing alumina passivation layers on crystalline silicon solar cells. / Vermeer, Ad; Gortzen, Roger; Poodt, P.; Roozeboom, F.

The Business of Nanotechnology III. Warrendale : Materials Research Society, 2011. p. 61-67 (Materials Research Society symposium proceedings; Vol. 1353).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Vermeer A, Gortzen R, Poodt P, Roozeboom F. The business of fast ALD equipment for depositing alumina passivation layers on crystalline silicon solar cells. In The Business of Nanotechnology III. Warrendale: Materials Research Society. 2011. p. 61-67. (Materials Research Society symposium proceedings). https://doi.org/10.1557/opl.2011.1497