The adsorption of silane, disilane and trisilane on polycrystalline silicon : a transient kinetic study

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@article{e49bf79f3fce4c03b33a9c413b3c6f92,

title = "The adsorption of silane, disilane and trisilane on polycrystalline silicon : a transient kinetic study",

author = "W.L.M. Weerts and \{Croon, de\}, M.H.J.M. and G.B.M.M. Marin",

year = "1996",

doi = "10.1016/S0039-6028(96)00876-X",

language = "English",

volume = "367",

pages = "321--339",

journal = "Surface Science",

issn = "0039-6028",

publisher = "Elsevier B.V.",

number = "3",

}

TY - JOUR

T1 - The adsorption of silane, disilane and trisilane on polycrystalline silicon : a transient kinetic study

AU - Weerts, W.L.M.

AU - Croon, de, M.H.J.M.

AU - Marin, G.B.M.M.

PY - 1996

Y1 - 1996

U2 - 10.1016/S0039-6028(96)00876-X

DO - 10.1016/S0039-6028(96)00876-X

M3 - Article

SN - 0039-6028

VL - 367

SP - 321

EP - 339

JO - Surface Science

JF - Surface Science

IS - 3

ER -