Test-station for flexible semi-automatic wafer-level silicon photonics testing

J. De Coster, P. De Heyn, M. Pantouvaki, B. Snyder, H. Chen, E.J. Marinissen, P. Absil, J. van Campenhout, B. Bolt

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

15 Citations (Scopus)
66 Downloads (Pure)


Silicon photonics technologies are a particularly attractive solution for developing low-cost optical interconnects with high performance. Imec is developing a silicon photonics technology platform. Developing this platform requires continuous process optimization and design verification, both of which are enabled by the flexible wafer-level test solution that is presented in this paper. The test station enables semi-automatic optical and electro-optical testing of passive and active silicon photonics components and circuits, including waveguides, fiber grating couplers, photodetectors, modulators, filters etc. The measured insertion loss of fiber grating couplers is repeatable to within 0.07dB (6σ), for photodetector responsivity the repeatability is around 0.02A/W (6σ). Calibration procedures have been designed to ensure the long-term reproducibility of measurement results. This is demonstrated with wafer-level measurement data for fiber grating couplers and photodetectors that were gathered over a five-month period. The reproducibility over this period is 0.8dB for the insertion loss and 0.09A/W for the responsivity measurement.
Original languageEnglish
Title of host publicationProceedings, 2016 21st IEEE European Test Symposium (ETS) :ETS 2016 : May 23rd-26th 2016, Amsterdam, the Netherlands
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Number of pages6
ISBN (Electronic)978-1-4673-9659-2
Publication statusPublished - 2016
Externally publishedYes
Event21st IEEE European Test Symposium (ETS 2016) - Amsterdam, Netherlands
Duration: 23 May 201626 May 2016
Conference number: 21


Conference21st IEEE European Test Symposium (ETS 2016)
Abbreviated titleETS 2016
Internet address


  • silicon photonics
  • optical interconnects
  • wafer-level testing


Dive into the research topics of 'Test-station for flexible semi-automatic wafer-level silicon photonics testing'. Together they form a unique fingerprint.

Cite this