Tensile-strained GeSn photodetectors with conformal nitride stressor

M. Morea, K. Zang, C.S. Fenrich, Y.-C. Huang, H. Chung, A.G. Curto, Y. Huo, T.I. Kamins, M.L. Brongersma, J.S. Harris

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)

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Physics & Astronomy