Tensile-strained GeSn photodetectors with conformal nitride stressor

M. Morea; K. Zang; C.S. Fenrich; Y.-C. Huang; H. Chung; A.G. Curto; Y. Huo; T.I. Kamins; M.L. Brongersma; J.S. Harris

doi:10.1109/PHOSST.2016.7548540

Tensile-strained GeSn photodetectors with conformal nitride stressor

M. Morea
, K. Zang
, C.S. Fenrich
, Y.-C. Huang
, H. Chung
, A.G. Curto
, Y. Huo
, T.I. Kamins
, M.L. Brongersma
, J.S. Harris

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Citations (Scopus)

Abstract

Applying tensile strain with silicon nitride is demonstrated to improve the responsivity of germanium-tin (Ge1-xSnx) PIN photodetectors at longer wavelengths. Such external stressor films show promise for extending the application of Ge1-xSnx optoelectronic devices into the mid-infrared range.

Original language	English
Title of host publication	2016 IEEE Photonics Society Summer Topical Meeting Series (SUM), 1-13 July 2016, Newport Beach, California
Place of Publication	Piscataway
Publisher	Institute of Electrical and Electronics Engineers
Pages	21-22
Number of pages	2
ISBN (Electronic)	978-1-5090-1900-7
ISBN (Print)	978-1-5090-1901-4
DOIs	https://doi.org/10.1109/PHOSST.2016.7548540
Publication status	Published - 2016
Event	2016 IEEE Photonics Society Summer Topical Meeting Series (SUM 2016) - Newport Beach Marriott Hotel, Newport Beach, United States Duration: 11 Jul 2016 → 13 Jul 2016 http://www.photonicsconferences.org/conferences/welcome?id=357845c5e1df934a7bb02ae890b5c481

Conference

Conference	2016 IEEE Photonics Society Summer Topical Meeting Series (SUM 2016)
Abbreviated title	SUM 2016
Country/Territory	United States
City	Newport Beach
Period	11/07/16 → 13/07/16
Internet address	http://www.photonicsconferences.org/conferences/welcome?id=357845c5e1df934a7bb02ae890b5c481

Keywords

GeSn
germanium-tin
photodetector
strain
nitride
group-IV photonics
Si photonics

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10.1109/PHOSST.2016.7548540

Cite this

Morea, M., Zang, K., Fenrich, C. S., Huang, Y.-C., Chung, H., Curto, A. G., Huo, Y., Kamins, T. I., Brongersma, M. L., & Harris, J. S. (2016). Tensile-strained GeSn photodetectors with conformal nitride stressor. In 2016 IEEE Photonics Society Summer Topical Meeting Series (SUM), 1-13 July 2016, Newport Beach, California (pp. 21-22). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/PHOSST.2016.7548540

@inproceedings{687fb0b7ce704cf88b1cdc860370bdc3,

title = "Tensile-strained GeSn photodetectors with conformal nitride stressor",

abstract = "Applying tensile strain with silicon nitride is demonstrated to improve the responsivity of germanium-tin (Ge1-xSnx) PIN photodetectors at longer wavelengths. Such external stressor films show promise for extending the application of Ge1-xSnx optoelectronic devices into the mid-infrared range.",

keywords = "GeSn, germanium-tin, photodetector, strain, nitride, group-IV photonics, Si photonics",

author = "M. Morea and K. Zang and C.S. Fenrich and Y.-C. Huang and H. Chung and A.G. Curto and Y. Huo and T.I. Kamins and M.L. Brongersma and J.S. Harris",

year = "2016",

doi = "10.1109/PHOSST.2016.7548540",

language = "English",

isbn = "978-1-5090-1901-4 ",

pages = "21--22",

booktitle = "2016 IEEE Photonics Society Summer Topical Meeting Series (SUM), 1-13 July 2016, Newport Beach, California",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "2016 IEEE Photonics Society Summer Topical Meeting Series (SUM 2016), SUM 2016 ; Conference date: 11-07-2016 Through 13-07-2016",

url = "http://www.photonicsconferences.org/conferences/welcome?id=357845c5e1df934a7bb02ae890b5c481",

}

Morea, M, Zang, K, Fenrich, CS, Huang, Y-C, Chung, H, Curto, AG, Huo, Y, Kamins, TI, Brongersma, ML & Harris, JS 2016, Tensile-strained GeSn photodetectors with conformal nitride stressor. in 2016 IEEE Photonics Society Summer Topical Meeting Series (SUM), 1-13 July 2016, Newport Beach, California. Institute of Electrical and Electronics Engineers, Piscataway, pp. 21-22, 2016 IEEE Photonics Society Summer Topical Meeting Series (SUM 2016), Newport Beach, United States, 11/07/16. https://doi.org/10.1109/PHOSST.2016.7548540

Tensile-strained GeSn photodetectors with conformal nitride stressor. / Morea, M.; Zang, K.; Fenrich, C.S. et al.
2016 IEEE Photonics Society Summer Topical Meeting Series (SUM), 1-13 July 2016, Newport Beach, California. Piscataway: Institute of Electrical and Electronics Engineers, 2016. p. 21-22.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Tensile-strained GeSn photodetectors with conformal nitride stressor

AU - Morea, M.

AU - Zang, K.

AU - Fenrich, C.S.

AU - Huang, Y.-C.

AU - Chung, H.

AU - Curto, A.G.

AU - Huo, Y.

AU - Kamins, T.I.

AU - Brongersma, M.L.

AU - Harris, J.S.

PY - 2016

Y1 - 2016

N2 - Applying tensile strain with silicon nitride is demonstrated to improve the responsivity of germanium-tin (Ge1-xSnx) PIN photodetectors at longer wavelengths. Such external stressor films show promise for extending the application of Ge1-xSnx optoelectronic devices into the mid-infrared range.

AB - Applying tensile strain with silicon nitride is demonstrated to improve the responsivity of germanium-tin (Ge1-xSnx) PIN photodetectors at longer wavelengths. Such external stressor films show promise for extending the application of Ge1-xSnx optoelectronic devices into the mid-infrared range.

KW - GeSn

KW - germanium-tin

KW - photodetector

KW - strain

KW - nitride

KW - group-IV photonics

KW - Si photonics

U2 - 10.1109/PHOSST.2016.7548540

DO - 10.1109/PHOSST.2016.7548540

M3 - Conference contribution

SN - 978-1-5090-1901-4

SP - 21

EP - 22

BT - 2016 IEEE Photonics Society Summer Topical Meeting Series (SUM), 1-13 July 2016, Newport Beach, California

PB - Institute of Electrical and Electronics Engineers

CY - Piscataway

T2 - 2016 IEEE Photonics Society Summer Topical Meeting Series (SUM 2016)

Y2 - 11 July 2016 through 13 July 2016

ER -

Tensile-strained GeSn photodetectors with conformal nitride stressor

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Conference

Keywords

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