Temperature and growth rate effects during the fast deposition of a-Si:H

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationICAMS : 17th International conference on Amorphous and Microcrystalline Semiconductors, Budapest, 25-29 August, 1997, Final programme abstracts
Pages124
Publication statusPublished - 1997

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