Tailoring the properties of 2D transition metal dichalcogenides by ALD

Ageeth A. Bol (Corresponding author), Shashank Balasubramanyam, Saravana Balaji Basuvalingam, Jeff J.P.M. Schulpen, Vincent Vandalon

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Two-dimensional transition metal dichalcogenides (2D-TMDs) are an exciting class of new materials. Their ultrathin body, optical band gap and unusual spin and valley polarization physics make them very promising candidates for a vast new range of (opto-)electronics and catalysis applications. So far, most experimental work on 2D-TMDs has been performed on exfoliated flakes made by the ‘Scotch tape’ technique. The major next challenge is the large-area synthesis of 2D-TMDs with control over their properties by a technique that ultimately
can be used in industry. This article will focus on ALD for large-area 2D-TMD synthesis for application in (opto-)electronics and catalysis and will highlight the precise control over the thickness, morphology, composition and phase of the 2D-TMDs that can be obtained by ALD.
Original languageEnglish
Pages (from-to)36-39
JournalNevac Blad
Issue number2
Publication statusPublished - 2 Jun 2020


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