Tailoring nanopore formation in atomic layer deposited ultrathin films

S. Karwal, T. Li, A. Yanguas-Gil, C.P. Canlas, Y. Lei, A.U. Mane, J.A. Libera, S. Seifert, R.E. Winans, J.W. Elam

Research output: Contribution to journal › Article › Academic › peer-review

16 Citations (Scopus)
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