Systems and methods for motion control in a semiconductor manufacturing apparatus

Krijn Frederik Bustraan; Nathan Robert Finney; Santiago E. Delpuerto; Huang Yang-Shan; R.G.C. de Bruijn; John Robert Burroughs

Systems and methods for motion control in a semiconductor manufacturing apparatus

Krijn Frederik Bustraan (Inventor)
, Nathan Robert Finney (Inventor)
, Santiago E. Delpuerto (Inventor)
, Huang Yang-Shan (Inventor)
, R.G.C. de Bruijn (Inventor)
, John Robert Burroughs (Inventor)

Research output: Patent › Patent publication

9 Downloads (Pure)

Abstract

A motion control system is described. The motion control system includes a releasable coupling coupled to a fine positioning stage and a coarse positioning stage. The releasable coupling is configured to mechanically couple the fine positioning stage to the coarse positioning stage during coarse positioning movements to transfer movement force from the coarse positioning stage to the fine positioning stage, and mechanically release the fine positioning stage from the coarse positioning stage during a processing operation such that the fine positioning stage is mechanically and dynamically decoupled from the coarse positioning stage. This release facilitates precision movements of the fine positioning stage. Mechanically coupling the fine positioning stage to the coarse positioning stage during coarse positioning movements facilitates reducing a required mass, volume, and/or energy consumption of fine positioning stage actuators, because these actuators need only control the relatively shorter stroke constant velocity movement of the fine positioning stage.

Original language	English
Patent number	WO2025093202
Priority date	30/10/23
Filing date	30/09/24
Publication status	Published - 8 May 2025

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Access to Document

WO2025093202A1Final published version, 2.77 MB

https://nl.espacenet.com/publicationDetails/biblio?CC=WO&NR=2025093202A1&KC=A1&FT=D&ND=3&date=20250508&DB=EPODOC&locale=nl_NL

Cite this

@misc{6842016c77794c58b47fafaf30eb0f3f,

title = "Systems and methods for motion control in a semiconductor manufacturing apparatus",

abstract = "A motion control system is described. The motion control system includes a releasable coupling coupled to a fine positioning stage and a coarse positioning stage. The releasable coupling is configured to mechanically couple the fine positioning stage to the coarse positioning stage during coarse positioning movements to transfer movement force from the coarse positioning stage to the fine positioning stage, and mechanically release the fine positioning stage from the coarse positioning stage during a processing operation such that the fine positioning stage is mechanically and dynamically decoupled from the coarse positioning stage. This release facilitates precision movements of the fine positioning stage. Mechanically coupling the fine positioning stage to the coarse positioning stage during coarse positioning movements facilitates reducing a required mass, volume, and/or energy consumption of fine positioning stage actuators, because these actuators need only control the relatively shorter stroke constant velocity movement of the fine positioning stage.",

author = "Bustraan, \{Krijn Frederik\} and Finney, \{Nathan Robert\} and Delpuerto, \{Santiago E.\} and Huang Yang-Shan and \{de Bruijn\}, R.G.C. and Burroughs, \{John Robert\}",

year = "2025",

month = may,

day = "8",

language = "English",

type = "Patent",

note = "WO2025093202",

}

TY - PAT

T1 - Systems and methods for motion control in a semiconductor manufacturing apparatus

AU - Bustraan, Krijn Frederik

AU - Finney, Nathan Robert

AU - Delpuerto, Santiago E.

AU - Yang-Shan, Huang

AU - de Bruijn, R.G.C.

AU - Burroughs, John Robert

PY - 2025/5/8

Y1 - 2025/5/8

N2 - A motion control system is described. The motion control system includes a releasable coupling coupled to a fine positioning stage and a coarse positioning stage. The releasable coupling is configured to mechanically couple the fine positioning stage to the coarse positioning stage during coarse positioning movements to transfer movement force from the coarse positioning stage to the fine positioning stage, and mechanically release the fine positioning stage from the coarse positioning stage during a processing operation such that the fine positioning stage is mechanically and dynamically decoupled from the coarse positioning stage. This release facilitates precision movements of the fine positioning stage. Mechanically coupling the fine positioning stage to the coarse positioning stage during coarse positioning movements facilitates reducing a required mass, volume, and/or energy consumption of fine positioning stage actuators, because these actuators need only control the relatively shorter stroke constant velocity movement of the fine positioning stage.

AB - A motion control system is described. The motion control system includes a releasable coupling coupled to a fine positioning stage and a coarse positioning stage. The releasable coupling is configured to mechanically couple the fine positioning stage to the coarse positioning stage during coarse positioning movements to transfer movement force from the coarse positioning stage to the fine positioning stage, and mechanically release the fine positioning stage from the coarse positioning stage during a processing operation such that the fine positioning stage is mechanically and dynamically decoupled from the coarse positioning stage. This release facilitates precision movements of the fine positioning stage. Mechanically coupling the fine positioning stage to the coarse positioning stage during coarse positioning movements facilitates reducing a required mass, volume, and/or energy consumption of fine positioning stage actuators, because these actuators need only control the relatively shorter stroke constant velocity movement of the fine positioning stage.

M3 - Patent publication

M1 - WO2025093202

Y2 - 2024/09/30

ER -

Systems and methods for motion control in a semiconductor manufacturing apparatus

Abstract

UN SDGs

Access to Document

Fingerprint

Cite this