Systematic numerical modelling of industrial plasma using PLASIMO

J. Dijk, van; W.J.M. Brok; B.H.P. Broks; A. Hartgers; M.J. Donker, van den; M.L. Beks; J.J.A.M. Mullen, van der

Systematic numerical modelling of industrial plasma using PLASIMO

J. Dijk, van, W.J.M. Brok, B.H.P. Broks, A. Hartgers, M.J. Donker, van den, M.L. Beks, J.J.A.M. Mullen, van der

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Abstract

In recent years the plasma simulation model Plasimo (http://plasimo.phys.tue.nl), has been developed at Eindhoven University of Technology. Initially intended as a program dedicated to the modelling of thermal argon ICP's, it has developed into a fully-fledged code capable of handling a variety of equilibrium and non-equilibrium plasmas. In this contribution we shall give an overview of the design and capabilities of Plasimo, and discuss the plasma sources to which it has been applied. A demonstration will be given of the application of Plasimo to light sources. We conclude with a discussion of present and future plans

Original language	English
Title of host publication	Proceedings of the High Technology Plasma Processes (HTTP9), 27 March-4 June, 2006, Saint-Petersburg, Russia
Pages	NLii3-
Publication status	Published - 2006
Event	High Technology Plasma Processes (HTTP9) - Saint-Petersburg, Russian Federation Duration: 27 May 2006 → 4 Jun 2006

Conference

Conference	High Technology Plasma Processes (HTTP9)
Abbreviated title	HTTP9
Country/Territory	Russian Federation
City	Saint-Petersburg
Period	27/05/06 → 4/06/06

Cite this

@inproceedings{13483dbb9b644a1d9d33a809983cfae0,

title = "Systematic numerical modelling of industrial plasma using PLASIMO",

abstract = "In recent years the plasma simulation model Plasimo (http://plasimo.phys.tue.nl), has been developed at Eindhoven University of Technology. Initially intended as a program dedicated to the modelling of thermal argon ICP's, it has developed into a fully-fledged code capable of handling a variety of equilibrium and non-equilibrium plasmas. In this contribution we shall give an overview of the design and capabilities of Plasimo, and discuss the plasma sources to which it has been applied. A demonstration will be given of the application of Plasimo to light sources. We conclude with a discussion of present and future plans",

author = "{Dijk, van}, J. and W.J.M. Brok and B.H.P. Broks and A. Hartgers and {Donker, van den}, M.J. and M.L. Beks and {Mullen, van der}, J.J.A.M.",

year = "2006",

language = "English",

pages = "NLii3--",

booktitle = "Proceedings of the High Technology Plasma Processes (HTTP9), 27 March-4 June, 2006, Saint-Petersburg, Russia",

note = "High Technology Plasma Processes (HTTP9), HTTP9 ; Conference date: 27-05-2006 Through 04-06-2006",

}

Dijk, van, J, Brok, WJM, Broks, BHP, Hartgers, A, Donker, van den, MJ, Beks, ML & Mullen, van der, JJAM 2006, Systematic numerical modelling of industrial plasma using PLASIMO. in Proceedings of the High Technology Plasma Processes (HTTP9), 27 March-4 June, 2006, Saint-Petersburg, Russia. pp. NLii3-, High Technology Plasma Processes (HTTP9), Saint-Petersburg, Russian Federation, 27/05/06.

TY - GEN

T1 - Systematic numerical modelling of industrial plasma using PLASIMO

AU - Dijk, van, J.

AU - Brok, W.J.M.

AU - Broks, B.H.P.

AU - Hartgers, A.

AU - Donker, van den, M.J.

AU - Beks, M.L.

AU - Mullen, van der, J.J.A.M.

PY - 2006

Y1 - 2006

N2 - In recent years the plasma simulation model Plasimo (http://plasimo.phys.tue.nl), has been developed at Eindhoven University of Technology. Initially intended as a program dedicated to the modelling of thermal argon ICP's, it has developed into a fully-fledged code capable of handling a variety of equilibrium and non-equilibrium plasmas. In this contribution we shall give an overview of the design and capabilities of Plasimo, and discuss the plasma sources to which it has been applied. A demonstration will be given of the application of Plasimo to light sources. We conclude with a discussion of present and future plans

AB - In recent years the plasma simulation model Plasimo (http://plasimo.phys.tue.nl), has been developed at Eindhoven University of Technology. Initially intended as a program dedicated to the modelling of thermal argon ICP's, it has developed into a fully-fledged code capable of handling a variety of equilibrium and non-equilibrium plasmas. In this contribution we shall give an overview of the design and capabilities of Plasimo, and discuss the plasma sources to which it has been applied. A demonstration will be given of the application of Plasimo to light sources. We conclude with a discussion of present and future plans

M3 - Conference contribution

SP - NLii3-

BT - Proceedings of the High Technology Plasma Processes (HTTP9), 27 March-4 June, 2006, Saint-Petersburg, Russia

T2 - High Technology Plasma Processes (HTTP9)

Y2 - 27 May 2006 through 4 June 2006

ER -

Systematic numerical modelling of industrial plasma using PLASIMO

Abstract

Conference

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