System identification for feedforward and feedback control : with application to semiconductor manufacturing

F.A.J. Boeren

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Mechanical Engineering
Supervisors/Advisors	Steinbuch, Maarten, Promotor Oomen, Tom A.E., Copromotor
Award date	3 Oct 2016
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-4111-9
Publication status	Published - 3 Oct 2016

Proefschrift. - Titel omslag: System identification for feedback and feeforward control

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@phdthesis{c8ca360029be4a6281c136433c8986d8,

title = "System identification for feedforward and feedback control : with application to semiconductor manufacturing",

author = "F.A.J. Boeren",

note = "Proefschrift. - Titel omslag: System identification for feedback and feeforward control",

year = "2016",

month = oct,

day = "3",

language = "English",

isbn = "978-90-386-4111-9",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Mechanical Engineering",

}

TY - THES

T1 - System identification for feedforward and feedback control : with application to semiconductor manufacturing

AU - Boeren, F.A.J.

N1 - Proefschrift. - Titel omslag: System identification for feedback and feeforward control

PY - 2016/10/3

Y1 - 2016/10/3

M3 - Phd Thesis 1 (Research TU/e / Graduation TU/e)

SN - 978-90-386-4111-9

PB - Technische Universiteit Eindhoven

CY - Eindhoven

ER -