System identification for feedforward and feedback control : with application to semiconductor manufacturing

F.A.J. Boeren

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Mechanical Engineering
Supervisors/Advisors
  • Steinbuch, Maarten, Promotor
  • Oomen, Tom A.E., Copromotor
Award date3 Oct 2016
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-4111-9
Publication statusPublished - 3 Oct 2016

Bibliographical note

Proefschrift. - Titel omslag: System identification for feedback and feeforward control

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