Abstract
| Original language | English |
|---|---|
| Pages (from-to) | 311-315 |
| Journal | Plasma Processes and Polymers |
| Volume | 13 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2016 |
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Synergy between plasma-assisted ALD and roll-to-roll atmospheric pressure PE-CVD processing of moisture barrier films on polymers. / Starostin, S.A.; Keuning, W.; Schalken, J.R.G.; Creatore, M.; Kessels, W.M.M.; Bouwstra, J.B.; Sanden, van de, M.C.M.; Vries, de, H.W.
In: Plasma Processes and Polymers, Vol. 13, No. 3, 2016, p. 311-315.Research output: Contribution to journal › Article › Academic › peer-review
TY - JOUR
T1 - Synergy between plasma-assisted ALD and roll-to-roll atmospheric pressure PE-CVD processing of moisture barrier films on polymers
AU - Starostin, S.A.
AU - Keuning, W.
AU - Schalken, J.R.G.
AU - Creatore, M.
AU - Kessels, W.M.M.
AU - Bouwstra, J.B.
AU - Sanden, van de, M.C.M.
AU - Vries, de, H.W.
PY - 2016
Y1 - 2016
N2 - The synergy between fast (1600 nm · min−1), roll-to-roll plasma-enhanced chemical vapor deposited (PE-CVD) SiO2 layers and plasma-assisted atomic layer deposited (PA-ALD) ultra-thin Al2O3 films has been investigated in terms of moisture permeation barrier properties. The effective and intrinsic water vapor transmission rates (WVTR) were studied as a function of the number of ALD cycles. It was demonstrated that a synergistic combination of a silica buffer layer deposited on polymer with an ultra-thin (≤ 2 nm) alumina barrier film can provide excellent intrinsic (10−5–10−6 g · m−2 · day−1) and good effective (∼10−3 g · m−2 · day−1) WVTR values, whereas both single layers individually exhibit poor barrier performances with effective WVTR values of ≥ 1.0 g · m−2 · day−1
AB - The synergy between fast (1600 nm · min−1), roll-to-roll plasma-enhanced chemical vapor deposited (PE-CVD) SiO2 layers and plasma-assisted atomic layer deposited (PA-ALD) ultra-thin Al2O3 films has been investigated in terms of moisture permeation barrier properties. The effective and intrinsic water vapor transmission rates (WVTR) were studied as a function of the number of ALD cycles. It was demonstrated that a synergistic combination of a silica buffer layer deposited on polymer with an ultra-thin (≤ 2 nm) alumina barrier film can provide excellent intrinsic (10−5–10−6 g · m−2 · day−1) and good effective (∼10−3 g · m−2 · day−1) WVTR values, whereas both single layers individually exhibit poor barrier performances with effective WVTR values of ≥ 1.0 g · m−2 · day−1
U2 - 10.1002/ppap.201500096
DO - 10.1002/ppap.201500096
M3 - Article
VL - 13
SP - 311
EP - 315
JO - Plasma Processes and Polymers
JF - Plasma Processes and Polymers
SN - 1612-8850
IS - 3
ER -