Surprising temperature dependence of the dust particle growth rate in low pressure Ar/C2H2 plasmas

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Abstract

We have experimentally monitored the growth rate of dust particles in a low pressure Ar/C2H2 radiofrequency discharge as a function of the gas temperature Tg and independent of the C2H radical density and the gas density. Used diagnostics are laser light scattering and measurements of the phase angle between the RF voltage and current. In contrast to most literature, we demonstrate that the growth rate is not a monotonically decreasing function of Tg but shows a maximum around Tg¿=¿65¿°C. In addition, we demonstrate that the phase angle is an accurate measure to monitor the particle growth rate
Original languageEnglish
Article number181503
Pages (from-to)181503-1-3
Number of pages3
JournalApplied Physics Letters
Volume99
Issue number18
DOIs
Publication statusPublished - 2011

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