@inproceedings{e25cc65b100e4841bfd64069b771cb40,
title = "Surface second harmonic generation as a diagnostic tool in silicon materials processing",
author = "J.J.H. Gielis and A.A.E. Stevens and I.M.P. Aarts and P.M. Gevers and H.C.W. Beijerinck",
year = "2005",
language = "English",
booktitle = "Proceedings of the 6th International Conference on Optics of Surfaces and Interfaces (OSI-VI), 6-10 June 2005, Aalborg University, Aalborg, Denmark",
note = "conference; Optics of Surfaces and Interfaces (OSI-VI); 2005-06-06; 2005-06-10 ; Conference date: 06-06-2005 Through 10-06-2005",
}