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Surface Passivation Mechanism of Atomic Layer Deposited Al2O3 Films on c-Si Studied by Optical Second-Harmonic Generation
J.J.H. Gielis, V. Verlaan, G. Dingemans, M.C.M. Sanden, van de, W.M.M. Kessels, N.M. Terlinden
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
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