Sum-frequency generation study of the surface chemistry during atomic layer deposition

V. Vandalon

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Kessels, W.M.M. (Erwin), Promotor van de Sanden, M.C.M. (Richard), Promotor
Award date	20 Jun 2017
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-4283-3
Publication status	Published - 20 Jun 2017

Proefschrift

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@phdthesis{dd6f79aefd0d4552b84c4aeba48d6a5f,

title = "Sum-frequency generation study of the surface chemistry during atomic layer deposition",

author = "V. Vandalon",

note = "Proefschrift",

year = "2017",

month = jun,

day = "20",

language = "English",

isbn = "978-90-386-4283-3",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}