Sum-frequency generation study of the surface chemistry during atomic layer deposition

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

345 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics
Supervisors/Advisors
  • Kessels, W.M.M. (Erwin), Promotor
  • van de Sanden, M.C.M. (Richard), Promotor
Award date20 Jun 2017
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-4283-3
Publication statusPublished - 20 Jun 2017

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