Original language | English |
---|---|
Title of host publication | 3rd international conference on hot-wire CVD (Cat-CVD) process : August 23-27, 2004, Utrecht, The Netherlands : extended abstracts |
Place of Publication | S.n. |
Publisher | s.n. |
Pages | 41-44 |
Publication status | Published - 2004 |
Substrate temperature dependence of the roughness evolution of HWCVD a-Si:H studied by real-time spectroscopic ellipsometry
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
1
Downloads
(Pure)