The high vertical index contrast and the small thickness of thin InP-based membrane structures bonded with BCB on Silicon allow the realization of very small devices. To make photonic integrated circuits with both passive and active components in these membranes, active-passive integration on a small scale is essential. In this paper we will present our results on sub-micrometer active areas for membrane applications.
|Title of host publication
|Proceedings of the 15th European Conference on Integrated Optics, ECIO10, April 06-09, Cambridge, United Kingdom
|I. White, R. Penty
|Place of Publication
|Institution of Engineering and Technology (IET)
|Published - 2010