Sub-5 nm patterning by directed self-assembly of oligo(Dimethylsiloxane) liquid crystal thin films

K. Nickmans, J.N. Murphy, S.A.J. de Waal, P. Leclere, J. Doise, R. Gronheid, D.J. Broer, A.P.H.J. Schenning

Research output: Contribution to journalArticleAcademicpeer-review

42 Citations (Scopus)
140 Downloads (Pure)
Original languageEnglish
Pages (from-to)10068-10072
Number of pages5
JournalAdvanced Materials
Volume28
Issue number45
DOIs
Publication statusPublished - 7 Dec 2016

Keywords

  • directed self-assembly
  • graphoepitaxy
  • high-χ low-N
  • liquid crystals
  • nanolithography
  • nanopatterning
  • oligo(dimethylsiloxane)

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