Sub-10 nm pattern placement verification of quantum tomography freestanding gratings

M.F.A. Eurlings, J.T.M. van Beek, M.J. Verheijen, J.P. Weterings, H.C.W. Beijerinck

    Research output: Contribution to journalArticleAcademicpeer-review

    2 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Sub-10 nm pattern placement verification of quantum tomography freestanding gratings'. Together they form a unique fingerprint.

    Physics & Astronomy

    Engineering & Materials Science

    Chemical Compounds