@inproceedings{d1d47bf423c742b485bf22374279205e,
title = "Study on the mechanism of polymer etching in Ar and O2 RF plasmas",
author = "J.A.G. Baggerman and E.J.H. Collart and R.J. Visser",
year = "1991",
language = "English",
isbn = "3-89336-075-1",
series = "Konferenzen des Forschungszentrums J{\"u}lich",
publisher = "Forschungszentrum J{\"u}lich",
pages = "224--229",
booktitle = "5th international symposium on Laser-aided plasma diagnostics : proceedings, Physikzentrum, Bad-Honnef, August 19-23, 1991",
address = "Germany",
}