Study of temperature programmed desorption of silicon nitride and sialon by means of mass spectrometry

Chen Mingyuan; J.W.T. Rutten, van; R. Metselaar

Study of temperature programmed desorption of silicon nitride and sialon by means of mass spectrometry

Chen Mingyuan, J.W.T. Rutten, van, R. Metselaar

Materials and Interface Chemistry

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

Temperature programmed desorption (TPD) by means of mass spectrometry was used to study the species, adsorbed on the surface of silicon nitride powders made ln dlfferent ways and ß-sialo n made in this laboratory. Several methods were used to treat the powders. The results indicate that the main specles des orbed are NH3, NH2, H2 N2 and H2O which are adsorbed at sites with different binding energies. Treatment wlth water and propanol can't remove the adsorbed species effectively. Heating in vacuum removes the adsorbed specles completely. Heatlng ln nitrogen removes most of the adsorbed species. A mechanism about adsorption and desorption is proposed to explaln the phenomena.

Original language	English
Title of host publication	Third EURO-Ceramics : vol. 1 : Proceedings of ceramics : Proceedings of the third European Ceramic Society Conference (THIRD ECerS), held on 12-17 September 1993 at the Madrid Congress & Exhibition Centre, Spain
Editors	P. Durán, J.F. Fernández
Place of Publication	Castellón de la Plana
Publisher	Faenza Editrice Iberica
Pages	597-602
ISBN (Print)	84-87683-05-3
Publication status	Published - 1993

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Mingyuan, C., Rutten, van, J. W. T., & Metselaar, R. (1993). Study of temperature programmed desorption of silicon nitride and sialon by means of mass spectrometry. In P. Durán, & J. F. Fernández (Eds.), Third EURO-Ceramics : vol. 1 : Proceedings of ceramics : Proceedings of the third European Ceramic Society Conference (THIRD ECerS), held on 12-17 September 1993 at the Madrid Congress & Exhibition Centre, Spain (pp. 597-602). Faenza Editrice Iberica.

Mingyuan, Chen ; Rutten, van, J.W.T. ; Metselaar, R. / Study of temperature programmed desorption of silicon nitride and sialon by means of mass spectrometry. Third EURO-Ceramics : vol. 1 : Proceedings of ceramics : Proceedings of the third European Ceramic Society Conference (THIRD ECerS), held on 12-17 September 1993 at the Madrid Congress & Exhibition Centre, Spain. editor / P. Durán ; J.F. Fernández. Castellón de la Plana : Faenza Editrice Iberica, 1993. pp. 597-602

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title = "Study of temperature programmed desorption of silicon nitride and sialon by means of mass spectrometry",

abstract = "Temperature programmed desorption (TPD) by means of mass spectrometry was used to study the species, adsorbed on the surface of silicon nitride powders made ln dlfferent ways and {\ss}-sialo n made in this laboratory. Several methods were used to treat the powders. The results indicate that the main specles des orbed are NH3, NH2, H2 N2 and H2O which are adsorbed at sites with different binding energies. Treatment wlth water and propanol can't remove the adsorbed species effectively. Heating in vacuum removes the adsorbed specles completely. Heatlng ln nitrogen removes most of the adsorbed species. A mechanism about adsorption and desorption is proposed to explaln the phenomena.",

author = "Chen Mingyuan and {Rutten, van}, J.W.T. and R. Metselaar",

year = "1993",

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pages = "597--602",

editor = "P. Dur{\'a}n and J.F. Fern{\'a}ndez",

booktitle = "Third EURO-Ceramics : vol. 1 : Proceedings of ceramics : Proceedings of the third European Ceramic Society Conference (THIRD ECerS), held on 12-17 September 1993 at the Madrid Congress & Exhibition Centre, Spain",

publisher = "Faenza Editrice Iberica",

}

Mingyuan, C, Rutten, van, JWT & Metselaar, R 1993, Study of temperature programmed desorption of silicon nitride and sialon by means of mass spectrometry. in P Durán & JF Fernández (eds), Third EURO-Ceramics : vol. 1 : Proceedings of ceramics : Proceedings of the third European Ceramic Society Conference (THIRD ECerS), held on 12-17 September 1993 at the Madrid Congress & Exhibition Centre, Spain. Faenza Editrice Iberica, Castellón de la Plana, pp. 597-602.

Study of temperature programmed desorption of silicon nitride and sialon by means of mass spectrometry. / Mingyuan, Chen; Rutten, van, J.W.T.; Metselaar, R.
Third EURO-Ceramics : vol. 1 : Proceedings of ceramics : Proceedings of the third European Ceramic Society Conference (THIRD ECerS), held on 12-17 September 1993 at the Madrid Congress & Exhibition Centre, Spain. ed. / P. Durán; J.F. Fernández. Castellón de la Plana: Faenza Editrice Iberica, 1993. p. 597-602.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Study of temperature programmed desorption of silicon nitride and sialon by means of mass spectrometry

AU - Mingyuan, Chen

AU - Rutten, van, J.W.T.

AU - Metselaar, R.

PY - 1993

Y1 - 1993

N2 - Temperature programmed desorption (TPD) by means of mass spectrometry was used to study the species, adsorbed on the surface of silicon nitride powders made ln dlfferent ways and ß-sialo n made in this laboratory. Several methods were used to treat the powders. The results indicate that the main specles des orbed are NH3, NH2, H2 N2 and H2O which are adsorbed at sites with different binding energies. Treatment wlth water and propanol can't remove the adsorbed species effectively. Heating in vacuum removes the adsorbed specles completely. Heatlng ln nitrogen removes most of the adsorbed species. A mechanism about adsorption and desorption is proposed to explaln the phenomena.

AB - Temperature programmed desorption (TPD) by means of mass spectrometry was used to study the species, adsorbed on the surface of silicon nitride powders made ln dlfferent ways and ß-sialo n made in this laboratory. Several methods were used to treat the powders. The results indicate that the main specles des orbed are NH3, NH2, H2 N2 and H2O which are adsorbed at sites with different binding energies. Treatment wlth water and propanol can't remove the adsorbed species effectively. Heating in vacuum removes the adsorbed specles completely. Heatlng ln nitrogen removes most of the adsorbed species. A mechanism about adsorption and desorption is proposed to explaln the phenomena.

M3 - Conference contribution

SN - 84-87683-05-3

SP - 597

EP - 602

BT - Third EURO-Ceramics : vol. 1 : Proceedings of ceramics : Proceedings of the third European Ceramic Society Conference (THIRD ECerS), held on 12-17 September 1993 at the Madrid Congress & Exhibition Centre, Spain

A2 - Durán, P.

A2 - Fernández, J.F.

PB - Faenza Editrice Iberica

CY - Castellón de la Plana

ER -

Mingyuan C, Rutten, van JWT, Metselaar R. Study of temperature programmed desorption of silicon nitride and sialon by means of mass spectrometry. In Durán P, Fernández JF, editors, Third EURO-Ceramics : vol. 1 : Proceedings of ceramics : Proceedings of the third European Ceramic Society Conference (THIRD ECerS), held on 12-17 September 1993 at the Madrid Congress & Exhibition Centre, Spain. Castellón de la Plana: Faenza Editrice Iberica. 1993. p. 597-602

Study of temperature programmed desorption of silicon nitride and sialon by means of mass spectrometry

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