Radiation damage effects in a PIPS particle detector have been studied by direct irradiation with a 4 MeV He+ focused ion beam, using the Eindhoven scanning ion microprobe set-up. This set-up enables extreme sensitivity and accuracy in pulse-height measurement. Pulse-height dependence on ion dose and the lateral variations of pulse-height response after damaging were studied, for different bias voltages. Pulse height was found to decrease linearly with ion dose and this could be observed after only a few ions per scan position, corresponding to a dose of 108/cm2. Pulse-height loss was found to be restricted to damaged detector areas. Consequences of this pulse-height dependence on ion dose and scan position for the accuracy of STIM analyses are discussed.
|Number of pages
|Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
|Published - 1 Jan 1997