Abstract
Submicron films of LiCoO2 have been deposited on silicon and stainless steel substrates using RF sputtering and pulsed laser deposition (PLD). Both films show preferred orientation. RF films have their Li diffusion plane oriented favourably, that is, perpendicular to the surface, while PLD films show a parallel, c-axis orientation. Electrochemical experiments indicate a strong dependence of the intercalation rate on the alignment of the host structure toward the electrolyte solution. Lithographic patterning enhances the inferior intercalation properties of the PLD film on silicon, as does the utilisation of stainless steel substrates.
| Original language | English |
|---|---|
| Pages (from-to) | 181-188 |
| Number of pages | 8 |
| Journal | Solid State Ionics |
| Volume | 152-153 |
| DOIs | |
| Publication status | Published - 1 Dec 2002 |
Funding
This research was made possible due to financial support from FOM. The authors are indebted to Philips Research Laboratory for technical support on sample preparation and characterization. Special thanks are due to J.F.M. Cillessen for operation and assistance on the PLD equipment, H. Koster for the SEM analysis; the Philips CFT department for the XRD measurements.
Keywords
- Intercalation
- LiCoO
- Preferential orientation
- Thin film
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