Structure and soft magnetic properties of sputter deposited MnZn-ferrite films

M.F. Gillies; R. Coehoorn; J.B.A.D. van Zon; D. Alders

doi:10.1063/1.367866

Structure and soft magnetic properties of sputter deposited MnZn-ferrite films

M.F. Gillies, R. Coehoorn, J.B.A.D. van Zon, D. Alders

Physics of Nanostructures

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Abstract

In this paper we report the soft magnetic properties of thin films of sputtered MnZn ferrite deposited on thermally oxidized Si substrates. A high deposition temperature, 600¿°C, together with the addition of water vapor to the sputtering gas was found to improve the initial ac permeability, µ. The highest value obtained was approximately 30. For MnZn-ferrite films with much larger grain sizes, as obtained by deposition on a polycrystalline Zn-ferrite substrate, a µ of 100 was obtained. The results are discussed in terms of the so-called nonmagnetic grain boundary model.

Original language	English
Pages (from-to)	6855-6857
Number of pages	3
Journal	Journal of Applied Physics
Volume	83
Issue number	11
DOIs	https://doi.org/10.1063/1.367866
Publication status	Published - 1998

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title = "Structure and soft magnetic properties of sputter deposited MnZn-ferrite films",

abstract = "In this paper we report the soft magnetic properties of thin films of sputtered MnZn ferrite deposited on thermally oxidized Si substrates. A high deposition temperature, 600¿°C, together with the addition of water vapor to the sputtering gas was found to improve the initial ac permeability, µ. The highest value obtained was approximately 30. For MnZn-ferrite films with much larger grain sizes, as obtained by deposition on a polycrystalline Zn-ferrite substrate, a µ of 100 was obtained. The results are discussed in terms of the so-called nonmagnetic grain boundary model.",

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T1 - Structure and soft magnetic properties of sputter deposited MnZn-ferrite films

AU - Gillies, M.F.

AU - Coehoorn, R.

AU - van Zon, J.B.A.D.

AU - Alders, D.

PY - 1998

Y1 - 1998

N2 - In this paper we report the soft magnetic properties of thin films of sputtered MnZn ferrite deposited on thermally oxidized Si substrates. A high deposition temperature, 600¿°C, together with the addition of water vapor to the sputtering gas was found to improve the initial ac permeability, µ. The highest value obtained was approximately 30. For MnZn-ferrite films with much larger grain sizes, as obtained by deposition on a polycrystalline Zn-ferrite substrate, a µ of 100 was obtained. The results are discussed in terms of the so-called nonmagnetic grain boundary model.

AB - In this paper we report the soft magnetic properties of thin films of sputtered MnZn ferrite deposited on thermally oxidized Si substrates. A high deposition temperature, 600¿°C, together with the addition of water vapor to the sputtering gas was found to improve the initial ac permeability, µ. The highest value obtained was approximately 30. For MnZn-ferrite films with much larger grain sizes, as obtained by deposition on a polycrystalline Zn-ferrite substrate, a µ of 100 was obtained. The results are discussed in terms of the so-called nonmagnetic grain boundary model.

U2 - 10.1063/1.367866

DO - 10.1063/1.367866

M3 - Article

SN - 0021-8979

VL - 83

SP - 6855

EP - 6857

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 11

ER -

Structure and soft magnetic properties of sputter deposited MnZn-ferrite films

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