In this paper we report the soft magnetic properties of thin films of sputtered MnZn ferrite deposited on thermally oxidized Si substrates. A high deposition temperature, 600¿°C, together with the addition of water vapor to the sputtering gas was found to improve the initial ac permeability, µ. The highest value obtained was approximately 30. For MnZn-ferrite films with much larger grain sizes, as obtained by deposition on a polycrystalline Zn-ferrite substrate, a µ of 100 was obtained. The results are discussed in terms of the so-called nonmagnetic grain boundary model.