TY - JOUR
T1 - Structural, optical and electrical properties of natively textured ZnO grown by PECVD for thin-film solar cell applications
AU - Löffler, J.
AU - Groenen, R.
AU - Sommeling, P.M.
AU - Linden, J.L.
AU - van de Sanden, M.C.M.
AU - Schropp, R.E.I.
PY - 2001
Y1 - 2001
N2 - Natively textured ZnO layers have been deposited between 150 and 350 °C with an expanding thennal plasma created by a cascaded arc. As shown by Scanning Electron Microscopy, Atomic Force Microscopy, X-ray Diffraction, and optical measurements, the crystallite size and surface roughness of the films increase with increasing substrate temperature. At the same time, columnar textured growth becomes less pronounced, and a change to granular structure is observed.The ZnO films exhibit low sheet resistance (<10 ..QIc~), high transmittance in the visible wavelength region (>80%) and effective light scattering properties. Preliminary amorphous silicon pin solar cells deposited on ZnO show an initial efficiency approaching 10 %, close to the value obtained on Asahi U-type Sn02:F.
AB - Natively textured ZnO layers have been deposited between 150 and 350 °C with an expanding thennal plasma created by a cascaded arc. As shown by Scanning Electron Microscopy, Atomic Force Microscopy, X-ray Diffraction, and optical measurements, the crystallite size and surface roughness of the films increase with increasing substrate temperature. At the same time, columnar textured growth becomes less pronounced, and a change to granular structure is observed.The ZnO films exhibit low sheet resistance (<10 ..QIc~), high transmittance in the visible wavelength region (>80%) and effective light scattering properties. Preliminary amorphous silicon pin solar cells deposited on ZnO show an initial efficiency approaching 10 %, close to the value obtained on Asahi U-type Sn02:F.
U2 - 10.4028/www.scientific.net/SSP.80-81.145
DO - 10.4028/www.scientific.net/SSP.80-81.145
M3 - Article
SN - 1012-0394
VL - 80-81
SP - 145
EP - 150
JO - Diffusion and Defect Data. Part B, Solid State Phenomena
JF - Diffusion and Defect Data. Part B, Solid State Phenomena
ER -