Stress reduction of PACVD amorphous diamond coatings by boron addition

V. Wagner, E.H.A. Dekempeneer, L.J. IJzendoorn, van, R. Sporken, R. Caudano, J. Geurts

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

1 Citation (Scopus)
1 Downloads (Pure)
Original languageEnglish
Title of host publicationThin films: stresses and mechanical properties VI : symposium held April 8 - 12, 1996, San Francisco, California, U.S.A.
EditorsW.W> Gerberich
Place of PublicationPittsburgh, Pa.
PublisherMaterials Research Society
Pages183-188
ISBN (Print)1-558-99339-8
Publication statusPublished - 1996
EventThin Films: Stresses and Mechanical Properties VI, April 8-12, 1996, San Francisco, CA, USA - San Francisco, CA, United States
Duration: 8 Apr 199612 Apr 1996

Publication series

NameMaterials Research Society Symposium Proceedings
Volume436
ISSN (Print)0272-9172

Conference

ConferenceThin Films: Stresses and Mechanical Properties VI, April 8-12, 1996, San Francisco, CA, USA
CountryUnited States
CitySan Francisco, CA
Period8/04/9612/04/96
OtherSymposium held at the 1996 MRS Spring Meeting

Cite this

Wagner, V., Dekempeneer, E. H. A., IJzendoorn, van, L. J., Sporken, R., Caudano, R., & Geurts, J. (1996). Stress reduction of PACVD amorphous diamond coatings by boron addition. In W. W. Gerberich (Ed.), Thin films: stresses and mechanical properties VI : symposium held April 8 - 12, 1996, San Francisco, California, U.S.A. (pp. 183-188). (Materials Research Society Symposium Proceedings; Vol. 436). Materials Research Society.