Strain relaxation in periodic arrays of Si/Si/Ge quantum wires determined by coplanar high-resolution x-ray diffraction and grazing incidence diffraction

Y. Zhuang, J. Stangl, A.A. Darhuber, P. Mikulik, S. Zerlauth, F. Schaffler, G. Bauer, N. Darowski, D. Lubbert, U. Pietsch

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