Strain measurements in ultra-thin buried films (<50 Å) with RBS ion channeling

L.J.M. Selen, F.J.J. Janssen, L.J. IJzendoorn, van, M.J.J. Theunissen, P.J.M. Smulders, M.J.A. Voigt, de

    Research output: Contribution to journalArticleAcademicpeer-review

    5 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)492-495
    Number of pages4
    JournalNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Publication statusPublished - 2000

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