Electro–mechanical sensors and actuators are a specific type of microsystems. The electrostatic pull-in value is one of the defining characteristics for these devices. Because the material and geometrical properties of micro fabricated systems are often very uncertain, this pull-in value can be subject to considerable variations. Therefore it is important to be able to estimate how uncertainty of mechanical properties propagates to the uncertainty of pull-in values. In this work the required design sensitivities of static and dynamic pull-in are derived. These sensitivities are used to perform a perturbation–based stochastic FEM analysis of an electromechanical device. This stochastic analysis consists of an uncertainty analysis and a reliability analysis. This stochastic analysis is validated by an expensive crude Monte Carlo computation.
|Name||IOP Conference Series: Material Science and Engineering|
|Conference||conference; 9th World Congress on Computational Mechanics and 4th Asian Pacific Congress on Computational Mechanics; 2010-07-19; 2010-07-23|
|Period||19/07/10 → 23/07/10|
|Other||9th World Congress on Computational Mechanics and 4th Asian Pacific Congress on Computational Mechanics|