Stochastic finite element method for analyzing static and dynamic pull-in of microsystems

S.D.A. Hannot, C.V. Verhoosel, J. Rixen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    Electro–mechanical sensors and actuators are a specific type of microsystems. The electrostatic pull-in value is one of the defining characteristics for these devices. Because the material and geometrical properties of micro fabricated systems are often very uncertain, this pull-in value can be subject to considerable variations. Therefore it is important to be able to estimate how uncertainty of mechanical properties propagates to the uncertainty of pull-in values. In this work the required design sensitivities of static and dynamic pull-in are derived. These sensitivities are used to perform a perturbation–based stochastic FEM analysis of an electromechanical device. This stochastic analysis consists of an uncertainty analysis and a reliability analysis. This stochastic analysis is validated by an expensive crude Monte Carlo computation.
    Original languageEnglish
    Title of host publication9th World Congress of Computational Mechanics (WCCM/APCOM 2010) 19-23 July 2010, Sydney Australia
    PublisherInstitute of Physics
    Pages12202-1/10
    DOIs
    Publication statusPublished - 2010
    Eventconference; 9th World Congress on Computational Mechanics and 4th Asian Pacific Congress on Computational Mechanics; 2010-07-19; 2010-07-23 -
    Duration: 19 Jul 201023 Jul 2010

    Publication series

    NameIOP Conference Series: Material Science and Engineering
    Volume10
    ISSN (Print)1757-8981

    Conference

    Conferenceconference; 9th World Congress on Computational Mechanics and 4th Asian Pacific Congress on Computational Mechanics; 2010-07-19; 2010-07-23
    Period19/07/1023/07/10
    Other9th World Congress on Computational Mechanics and 4th Asian Pacific Congress on Computational Mechanics

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