| Original language | English |
|---|---|
| Title of host publication | Microtechnology for transducers : proceedings, Enschede, the Netherlands, October 30-31, 1986 / Ed. J.C. Lodder |
| Place of Publication | Deventer |
| Publisher | Kluwer Technische Boeken |
| Pages | 45-55 |
| ISBN (Print) | 90-201-1952-4 |
| Publication status | Published - 1986 |
Publication series
| Name | Sensors and actuators : symposium, Enschede : proceedings |
|---|---|
| Volume | 3 |
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