Spontaneous nanoclustering of ZrO2 in atomic layer deposited LayZr1-yOx thin films

K.B. Jinesh, W.F.A. Besling, E. Tois, J.H. Klootwijk, R.P.C. Wolters, W. Dekkers, M. Kaiser, F.E. Bakker, M. Tuominen, F. Roozeboom

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
114 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Spontaneous nanoclustering of ZrO2 in atomic layer deposited LayZr1-yOx thin films'. Together they form a unique fingerprint.

Physics & Astronomy