Specular and off-specular x-ray reflectivity study of ion irradiated Co/Pt multilayers

C. Schug; H. Grimm; R. Berger; A.H. Dietzel; M. Wormington

doi:10.1002/sia.1797

Specular and off-specular x-ray reflectivity study of ion irradiated Co/Pt multilayers

C. Schug
, H. Grimm
, R. Berger
, A.H. Dietzel
, M. Wormington

Research output: Contribution to journal › Article › Academic › peer-review

3 Citations (Scopus)

Abstract

Co/Pt thin film superlattices with strong perpendicular anisotropy and out-of-plane coercivities of 5–11 kOe were irradiated with Xe+ ions to tailor their magnetic properties. Specular and off-specular x-ray reflectivity (XRR) studies were performed to correlate the irradiation-induced coercivity reduction with changes of the interfacial properties. Off-specular XRR turned out to be particularly sensitive to the Co/Pt superlattice period. By applying the distorted wave Born approximation to simulate the diffusely scattered intensity, we were able to quantify the vertical roughness correlation throughout the superlattice stack. Study of a Co/Pt multilayer exposed to different Xe+ ion doses suggests that progressive ion bombardment causes a gradual loss of conformality between the different interfaces and a change of the interface morphology, whereas initial vertical RMS roughness values are not affected. Copyright © 2004 John Wiley & Sons, Ltd.

Original language	English
Pages (from-to)	908-911
Journal	Surface and Interface Analysis
Volume	36
Issue number	8
DOIs	https://doi.org/10.1002/sia.1797
Publication status	Published - 2004

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title = "Specular and off-specular x-ray reflectivity study of ion irradiated Co/Pt multilayers",

abstract = "Co/Pt thin film superlattices with strong perpendicular anisotropy and out-of-plane coercivities of 5–11 kOe were irradiated with Xe+ ions to tailor their magnetic properties. Specular and off-specular x-ray reflectivity (XRR) studies were performed to correlate the irradiation-induced coercivity reduction with changes of the interfacial properties. Off-specular XRR turned out to be particularly sensitive to the Co/Pt superlattice period. By applying the distorted wave Born approximation to simulate the diffusely scattered intensity, we were able to quantify the vertical roughness correlation throughout the superlattice stack. Study of a Co/Pt multilayer exposed to different Xe+ ion doses suggests that progressive ion bombardment causes a gradual loss of conformality between the different interfaces and a change of the interface morphology, whereas initial vertical RMS roughness values are not affected. Copyright {\textcopyright} 2004 John Wiley \& Sons, Ltd.",

author = "C. Schug and H. Grimm and R. Berger and A.H. Dietzel and M. Wormington",

year = "2004",

doi = "10.1002/sia.1797",

language = "English",

volume = "36",

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journal = "Surface and Interface Analysis",

issn = "0142-2421",

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TY - JOUR

T1 - Specular and off-specular x-ray reflectivity study of ion irradiated Co/Pt multilayers

AU - Schug, C.

AU - Grimm, H.

AU - Berger, R.

AU - Dietzel, A.H.

AU - Wormington, M.

PY - 2004

Y1 - 2004

N2 - Co/Pt thin film superlattices with strong perpendicular anisotropy and out-of-plane coercivities of 5–11 kOe were irradiated with Xe+ ions to tailor their magnetic properties. Specular and off-specular x-ray reflectivity (XRR) studies were performed to correlate the irradiation-induced coercivity reduction with changes of the interfacial properties. Off-specular XRR turned out to be particularly sensitive to the Co/Pt superlattice period. By applying the distorted wave Born approximation to simulate the diffusely scattered intensity, we were able to quantify the vertical roughness correlation throughout the superlattice stack. Study of a Co/Pt multilayer exposed to different Xe+ ion doses suggests that progressive ion bombardment causes a gradual loss of conformality between the different interfaces and a change of the interface morphology, whereas initial vertical RMS roughness values are not affected. Copyright © 2004 John Wiley & Sons, Ltd.

AB - Co/Pt thin film superlattices with strong perpendicular anisotropy and out-of-plane coercivities of 5–11 kOe were irradiated with Xe+ ions to tailor their magnetic properties. Specular and off-specular x-ray reflectivity (XRR) studies were performed to correlate the irradiation-induced coercivity reduction with changes of the interfacial properties. Off-specular XRR turned out to be particularly sensitive to the Co/Pt superlattice period. By applying the distorted wave Born approximation to simulate the diffusely scattered intensity, we were able to quantify the vertical roughness correlation throughout the superlattice stack. Study of a Co/Pt multilayer exposed to different Xe+ ion doses suggests that progressive ion bombardment causes a gradual loss of conformality between the different interfaces and a change of the interface morphology, whereas initial vertical RMS roughness values are not affected. Copyright © 2004 John Wiley & Sons, Ltd.

U2 - 10.1002/sia.1797

DO - 10.1002/sia.1797

M3 - Article

SN - 0142-2421

VL - 36

SP - 908

EP - 911

JO - Surface and Interface Analysis

JF - Surface and Interface Analysis

IS - 8

ER -

Specular and off-specular x-ray reflectivity study of ion irradiated Co/Pt multilayers

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